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Journal of Electronic Materials

Volumn 32, Issue 3, 2003, Pages 191-194

Composite substrate material for surface acoustic-wave oscillator

(3) Wu, Sean a Chen, Yeong Chin a Lee, Maw Shung b

a TUNG FANG INSTITUTE OF TECHNOLOGY (Taiwan)

b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES (Taiwan)

Author keywords

AlN; Oscillator; Sputtering; TCF; Y 128 LiNbO3

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CRYSTAL ORIENTATION; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; HIGH TEMPERATURE EFFECTS; LITHIUM NIOBATE; MAGNETRON SPUTTERING; OSCILLATORS (ELECTRONIC); THERMODYNAMIC STABILITY; THICKNESS MEASUREMENT; X RAY DIFFRACTION ANALYSIS;

COMPOSITE SUBSTRATE MATERIAL; SURFACE ACOUSTIC WAVE OSCILLATOR; TEMPERATURE COEFFICIENT OF FREQUENCY;

COMPOSITE MATERIALS;

EID: 0037349006 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/s11664-003-0192-1 Document Type: Article

Times cited : (2)

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