CMOS Vertical Hall Magnetic Sensors on Flexible Substrate

IEEE Sensors Journal

Volumn 16, Issue 24, 2016, Pages 8736-8743

  Heidari, Hadi ^a   Bonizzoni, Edoardo ^b   Gatti, Umberto ^b   Maloberti, Franco ^b   Dahiya, Ravinder ^a  

^a UNIVERSITY OF GLASGOW   (United Kingdom)

^b UNIVERSITY OF PAVIA   (Italy)

Author keywords

CMOS magnetic sensor; flexible substrate; magnetic field; mechanical stress; Vertical Hall sensor

Indexed keywords

HALL EFFECT TRANSDUCERS; MAGNETIC FIELDS; MAGNETIC SENSORS; MAGNETISM; SUBSTRATES;

CMOS MAGNETIC SENSOR; COMSOL MULTIPHYSICS; FABRICATION IMPERFECTIONS; FLEXIBLE SUBSTRATE; MECHANICAL STRESS; SIMULATIONS AND MEASUREMENTS; SPINNING TECHNIQUE; VERTICAL HALL SENSORS;

CMOS INTEGRATED CIRCUITS;

EID: 85013230906     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2016.2575802     Document Type: Article

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