A 256 pixel magnetoresistive biosensor microarray in 0.18 μm CMOS

IEEE Journal of Solid-State Circuits

Volumn 48, Issue 5, 2013, Pages 1290-1301

  Hall, Drew A ^a   Gaster, Richard S ^b   Makinwa, Kofi A A ^c   Wang, Shan X ^b   Murmann, Boris ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b STANFORD UNIVERSITY   (United States)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Biochip; Biosensor; GMR spin valve; Magnetic biosensor; Proteomics; Sigma delta modulator

Indexed keywords

BIOSENSOR MICROARRAYS; EARLY DISEASE DETECTION; GIANT MAGNETORESISTIVE; MAGNETIC BIOSENSORS; PEPTIDASE INHIBITORS; PROTEOMICS; SIGMA DELTA MODULATOR; SPIN-VALVES;

BIOASSAY; BIOCHIPS; BIOSENSORS; DIAGNOSIS; GIANT MAGNETORESISTANCE; MEDICAL NANOTECHNOLOGY; MOLECULAR BIOLOGY; SENSORS;

MAGNETIC RECORDING;

EID: 84893004309     PISSN: 00189200     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSSC.2013.2245058     Document Type: Article

References (50)

1. R. P. Million, "Impact of genetic diagnostics on drug development strategy," Nature Reviews Drug Discovery, vol. 5, no. 6, pp. 459-462, May 2006.
2. M. Schena, D. Shalon, R. W. Davis, and P. O. Brown, "Quantitative monitoring of gene expression patterns with a complementary DNA microarray," Science, vol. 270, no. 5235, pp. 467-470, Oct. 1995.
3. S. Cheng, C. Fockler, W.M. Barnes, and R. Higuchi, "Effective amplification of long targets from cloned inserts and human genomic DNA," PNAS, vol. 91, no. 12, pp. 5695-5699, Jun. 1994.
4. C. S. Thaxton, R. Elghanian, A. D. Thomas, S. I. Stoeva, J.-S. Lee, N. D. Smith, A. J. Schaeffer, H. Klocker, W. Horninger, G. Bartsch, and C. A. Mirkin, "Nanoparticle-based bio-barcode assay redefines 'undetectable' PSA and biochemical recurrence after radical prostatectomy," PNAS, vol. 106, no. 44, pp. 18437-18442, Nov. 2009.
5. D. A. Hall, R. S. Gaster, S. J. Osterfeld, K. Makinwa, S. X. Wang, and B. Murmann, "A 256 channel magnetoresistive biosensor microarray for quantitative proteomics," in Symp. VLSI Circuits (VLSIC) Dig., 2011, pp. 174-175.
6. R. Curry, H. Heitzman, D. Riege, R. Sweet, and M. Simonsen, "A systems approach to fluorescent immunoassay:General principles and representative applications," Clin. Chem., vol. 25, no. 9, pp. 1591-1595, Sep. 1979.
7. M. Han, X. Gao, J. Z. Su, and S. Nie, "Quantum-dot-tagged microbeads for multiplexed optical coding of biomolecules," Nature Biotech., vol. 19, no. 7, pp. 631-635, Jul. 2001.
8. P. M. Levine, P. Gong, R. Levicky, and K. L. Shepard, "Active CMOS sensor array for electrochemical biomolecular detection," IEEE J. Solid-State Circuits, vol. 43, no. 8, pp. 1859-1871, Aug. 2008.
9. R. S. Gaster, D. A. Hall, C. H. Nielsen, S. J. Osterfeld, H. Yu, K. E. Mach, R. J. Wilson, B. Murmann, J. C. Liao, S. S. Gambhir, and S. X. Wang, "Matrix-insensitive protein assays push the limits of biosensors in medicine," Nature Med., vol. 15, no. 11, pp. 1327-1332, Nov. 2009.
10. H. Wang, Y. Chen, A. Hassibi, A. Scherer, and A. Hajimiri, "A frequency-shift CMOS magnetic biosensor array with single-bead sensitivity and no external magnet," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2009, 2009, pp. 438-439, 439a.
11. H. Lee, E. Sun, D. Ham, and R. Weissleder, "Chip-NMR biosensor for detection and molecular analysis of cells," Nature Med., vol. 14, no. 8, pp. 869-874, Jul. 2008.
12. O. Florescu, M. Mattmann, and B. Boser, "Fully integrated detection of single magnetic beads in complementary metal-oxide-semiconductor," J. Appl. Phys., vol. 103, no. 4, p. 046101, 2008.
13. P. Liu, K. Skucha, Y. Duan, M. Megens, J. Kim, I. Izyumin, S. Gambini, and B. Boser, "Magnetic relaxation detector for microbead labels in biomedical assays," in Symp. VLSI Circuits (VLSIC) Dig., 2011, pp. 176-177.
14. J. Fritz, M. K. Baller, H. P. Lang, H. Rothuizen, P. Vettiger, E. Meyer, H.-J. Güntherodt, C. Gerber, and J. K. Gimzewski, "Translating biomolecular recognition into nanomechanics," Science, vol. 288, no. 5464, pp. 316-318, Apr. 2000.
15. E. Stern, J. F. Klemic, D. A. Routenberg, P. N. Wyrembak, D. B. Turner-Evans, A. D. Hamilton, D. A. LaVan, T. M. Fahmy, and M. A. Reed, "Label-free immunodetection with CMOS-compatible semiconducting nanowires," Nature, vol. 445, no. 7127, pp. 519-522, Feb. 2007.
16. C. Hagleitner, A. Hierlemann, D. Lange, A. Kummer, N. Kerness, O. Brand, and H. Baltes, "Smart single-chip gas sensor microsystem," Nature, vol. 414, no. 6861, pp. 293-296, Nov. 2001.
17. J. Clarke, H.-C. Wu, L. Jayasinghe, A. Patel, S. Reid, and H. Bayley, "Continuous base identification for single-molecule nanopore DNA sequencing," Nature Nano, vol. 4, no. 4, pp. 265-270, Apr. 2009.
18. C. Boozer, G. Kim, S. Cong, H. Guan, and T. Londergan, "Looking towards label-free biomolecular interaction analysis in a high-throughput format: A review of new surface plasmon resonance technologies," Current Opinion Biotechnol., vol. 17, no. 4, pp. 400-405, Aug. 2006.
19. H. Giloh and J. Sedat, "Fluorescence microscopy: Reduced photobleaching of rhodamine and fluorescein protein conjugates by n-propyl gallate," Science, vol. 217, no. 4566, pp. 1252-1255, Sep. 1982.
20. J. E. Aubin, "Autofluorescence of viable cultured mammalian cells," J. Histochem. Cytochem., vol. 27, no. 1, pp. 36-43, Jan. 1979.
21. D. M. Bruls, T. H. Evers, J. A. H. Kahlman, P. J. W. van Lankvelt, M. Ovsyanko, E. G. M. Pelssers, J. J. H. B. Schleipen, F. K. de Theije, C. A. Verschuren, T. van der Wijk, J. B. A. van Zon, W. U. Dittmer, A. H. J. Immink, J. H. Nieuwenhuis, and M. W. J. Prins, "Rapid integrated biosensor for multiplexed immunoassays based on actuated magnetic nanoparticles," Lab Chip, vol. 9, no. 24, pp. 3504-3510, Oct. 2009.
22. T. Aytur, J. Foley, M. Anwar, B. Boser, E. Harris, and P. R. Beatty, "A novelmagnetic bead bioassay platformusing a microchip-based sensor for infectious disease diagnosis," J. Immunolog. Meth., vol. 314, no. 1-2, pp. 21-29, Jul. 2006.
23. J. C. Rife, M. M. Miller, P. E. Sheehan, C. R. Tamanaha, M. Tondra, and L. J. Whitman, "Design and performance of GMR sensors for the detection of magnetic microbeads in biosensors," Sensors Actuators A: Phys., vol. 107, no. 3, pp. 209-218, Nov. 2003.
24. H. Yu, S. J. Osterfeld, L. Xu, R. L. White, N. Pourmand, and S. X. Wang, "Giant magnetoresistive biosensors for molecular diagnosis: Surface chemistry and assay development," in Biosensing, San Diego, CA, USA, 2008, pp. 70350E-70350E-9.
25. R. S. Gaster, L. Xu, S.-J. Han, R. J. Wilson, D. A. Hall, S. J. Osterfeld, H. Yu, and S. X. Wang, "Quantification of protein interactions and solution transport using high-density GMR sensor arrays," Nature Nano, vol. 6, no. 5, pp. 314-320, May 2011.
26. C. H. Tsang, R. E. Fontana, T. Lin, D. E. Heim, B. A. Gurney, and M. L. Williams, "Design, fabrication, and performance of spin-valve read heads for magnetic recording applications," IBM J. Res. Develop., vol. 42, no. 1, pp. 103-116, Jan. 1998.
27. S. J. Osterfeld, H. Yu, R. S. Gaster, S. Caramuta, L. Xu, S.-J. Han, D. A. Hall, R. J. Wilson, S. Sun, R. L. White, R. W. Davis, N. Pourmand, and S. X. Wang, "Multiplex protein assays based on real-time magnetic nanotag sensing," PNAS, vol. 105, no. 52, pp. 20637-20640, Dec. 2008.
28. D. A. Hall, R. S. Gaster, T. Lin, S. J. Osterfeld, S. Han, B. Murmann, and S. X. Wang, "GMR biosensor arrays: A system perspective," Biosensors Bioelectron., vol. 25, no. 9, pp. 2051-2057, May 2010.
29. B.M. de Boer, J.A. H. M. Kahlman, T. P.G.H. Jansen, H. Duric, and J. Veen, "An integrated and sensitive detection platform for magneto-resistive biosensors," Biosensors Bioelectron., vol. 22, no. 9-10, pp. 2366-2370, Apr. 2007.
30. T. Aytur, P. R. Beatty, B. Boser, M. Anwar, and T. Ishikawa, "An immunoassay platform based on CMOS Hall sensors," in Proc. Solid-State and Actuator Workshop, Hilton Head Island, SC, USA, 2002, pp. 126-129.
31. S.-J. Han, H. Yu, B. Murmann, N. Pourmand, and S. X. Wang, "A high-density magnetoresistive biosensor array with drift-compensation mechanism," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2007, 2007, pp. 168-594.
32. A. Romani, N. Manaresi, L. Marzocchi, G. Medoro, A. Leonardi, L. Altomare, M. Tartagni, and R. Guerrieri, "Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2004, 2004, pp. 224-225.
33. M. Augustyniak, C. Paulus, R. Brederlow, N. Persike, G. Hartwich, D. Schmitt-Landsiedel, and R. Thewes, "A 24 x 16 CMOS-based chrono-coulometric DNA microarray," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2006, 2006, pp. 59-68.
34. B. E. Boser and B. A. Wooley, "The design of sigma-delta modulation analog-to-digital converters," IEEE J. Solid-State Circuits, vol. SC-23, no. 6, pp. 1298-1308, Dec. 1988.
35. R. Schreier, Delta Sigma Toolbox, 2000.
36. S. Ardalan and J. Paulos, "An analysis of nonlinear behavior in delta-sigma modulators," IEEE Trans. Circuits Syst., vol. 34, no. 6, pp. 593-603, Jun. 1987.
37. A. R. Feldman, B. E. Boser, and P. R. Gray, "A 13-bit, 1.4-MS/s sigma-delta modulator for RF baseband channel applications," IEEE J. Solid-State Circuits, vol. 33, no. 10, pp. 1462-1469, Oct. 1998.
38. M. Dessouky and A. Kaiser, "Rail-to-rail operation of very low voltage CMOS switched-capacitor circuits," in Proc. IEEE Int. Symp. Circuits and Systems, ISCAS'99, 1999, vol. 2, pp. 144-147.
39. B. Murmann, ADC Performance Survey 1997-2012. [Online]. Available: http://www.stanford.edu/~murmann/adcsurvey.html
40. J. Goes, B. Vaz, R. Monteiro, and N. Paulino, "A 0.9 V ΔΣ modulator with 80 dB SNDR and 83 dB DR using a single-phase technique," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2006, 2006, pp. 191-200.
41. R. van Veldhoven, R. Rutten, and L. J. Breems, "An inverter-based hybrid ΔΣ modulator," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2008, 2008, pp. 492-630.
42. Y. Chae and G. Han, "A low power sigma-delta modulator using Class-C inverter," in VLSI 2008.
43. D. A. Hall, R. S. Gaster, S. J. Osterfeld, B. Murmann, and S. X. Wang, "GMR biosensor arrays: Correction techniques for reproducibility and enhanced sensitivity," Biosensors Bioelectron., vol. 25, no. 9, pp. 2177-2181, May 2010.
44. W.-L. Cheng, C.-S. Wang, Y.-H. Huang, Y. Liang, P. Y. Lin, C. Hsueh, Y.-C. Wu, W.-J. Chen, C.-J. Yu, S.-R. Lin, and K.-H. Lin, "Overexpression of a secretory leukocyte protease inhibitor in human gastric cancer," Int. J. Cancer, vol. 123, no. 8, pp. 1787-1796, Oct. 2008.
45. S. Tsukishiro, N. Suzumori, H. Nishikawa, A. Arakawa, and K. Suzumori, "Use of serum secretory leukocyte protease inhibitor levels in patients to improve specificity of ovarian cancer diagnosis," Gynecol. Oncol., vol. 96, no. 2, pp. 516-519, Feb. 2005.
46. R. S. Gaster, D. A. Hall, and S. X. Wang, "Autoassembly protein arrays for analyzing antibody cross-reactivity," Nano Lett., vol. 11, no. 7, pp. 2579-2583, Jul. 2011.
47. R. S. Gaster, D. A. Hall, and S. X. Wang, "nanoLAB: An ultraportable, handheld diagnostic laboratory for global health," Lab Chip, vol. 11, no. 5, p. 950, Jan. 2011.
48. N. Sun, T.-J. Yoon, H. Lee, W. Andress, R. Weissleder, and D. Ham, "Palm NMR and 1-chip NMR," IEEE J. Solid-State Circuits, vol. 46, no. 1, pp. 342-352, Jan. 2011.
49. J. L. Arlett, E. B. Myers, and M. L. Roukes, "Comparative advantages of mechanical biosensors," Nature Nanotechnol., vol. 6, no. 4, pp. 203-215, Mar. 2011.
50. S. Gambini, K. Skucha, P. Liu, J. Kim, R. Krigel, R. Mathies, and B. Boser, "A CMOS 10 kpixel baseline-free magnetic bead detector with column-parallel readout for miniturized immunoassays," in IEEE Int. Solid-State Circuits Conf. Dig. Tech. Papers, ISSCC 2012, 2012, pp. 126-127.