Three-dimensional measurement by tilting & moving objective lens in CD-SEM (II)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5375, Issue PART 2, 2004, Pages 1112-1117

  Abe, K ^a   Kimura, K ^a   Tsuruga, Y ^a   Okada, S ^a   Suzuki, H ^a   Kochi, N ^a   Koike, H ^a   Hamaguchi, A ^b   Yamazaki, Y ^b  

^a TOPCON CORPORATION   (Japan)

^b TOSHIBA CORPORATION   (Japan)

Author keywords

CD SEM; Electron Magnetic Optical System; Three dimensional measurement

Indexed keywords

EECTRON-MAGNETIC OPTICAL SYSTEMS; MOVING OBJECT LENSES; THREE-DIMENSIONAL MEASUREMENTS;

ABERRATIONS; ALGORITHMS; CALIBRATION; ELECTRON BEAMS; IMAGE PROCESSING; MAGNETIC FIELD EFFECTS; OPTICAL INSTRUMENT LENSES; OPTICAL RESOLVING POWER;

SCANNING ELECTRON MICROSCOPY;

EID: 4344673169     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.536134     Document Type: Conference Paper

References (2)

1. E.Munro "Calculation of the Optical Properties of Combined Magnetic Lens and Deflection System with Superimposed Fields" Optik Vol.39 450-466 (1974)
2. K.Kimura,et.al "Three-dimensional Measurement by Tilting & Moving Objective Lens in CD-SEM" ,Proceedings of SPIE Vol.5038.(2003)