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Volumn 11, Issue 2, 2003, Pages 89-95
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Reconstruction of the surface topography of randomly textured silicon
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Author keywords
Anisotropic etching; Characterisation; Random pyramids; Silicon; Stereoscopic; Surface topography; Texture; Thin film
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Indexed keywords
ETCHING;
SCANNING ELECTRON MICROSCOPY;
SPECIAL EFFECTS;
SURFACE STRUCTURE;
TEXTURES;
THIN FILMS;
ANISOTROPIC ETCHING;
SURFACE TOPOGRAPHY;
SILICON WAFERS;
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EID: 0037339987
PISSN: 10627995
EISSN: None
Source Type: Journal
DOI: 10.1002/pip.463 Document Type: Article |
Times cited : (15)
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References (5)
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