Improving the speed of scanning electron microscope deflection systems

Measurement Science and Technology

Volumn 10, Issue 11, 1999, Pages 1070-1074

  Lee, K W ^a   Thong, J T L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Electromagnetic deflection; Scanning electron microscope

Indexed keywords

ELECTRON BEAMS; TRANSFER FUNCTIONS;

ELECTROMAGNETIC DEFLECTION;

SCANNING ELECTRON MICROSCOPY;

EID: 0033294938     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/10/11/316     Document Type: Article

References (6)

1. Pfeiffer H C 1975 J. Vac. Sci. Technol. 12 1170
2. Wardly G A 1973 J. Appl. Phys. 44 3766
3. Pfeiffer H C and Sturans M A 1980 J. Appl. Phys. 51 3516
4. Yasutake N, Takashashi Y, Oae Y, Yamada A, Kai J, Yasuda H and Kawashima K 1992 Japan. J. Appl. Phys. 31 4241
5. Thong J T L and Li F L 1996 Meas. Sci. Technol. 7 1583
6. Kratschmer E, Rishton S A, Kern D P and Chang T H P 1988 J. Vac. Sci. Technol. B 6 2074