Control System of a Nanohandling Cell within a Scanning Electron Microscope

Proceedings of the 20th IEEE International Symposium on Intelligent Control, ISIC '05 and the 13th Mediterranean Conference on Control and Automation, MED '05

Volumn 2005, Issue , 2005, Pages 964-969

  Jahnisch M ^a   Hulsen H ^a   Sievers, T ^a   Fatikow, S ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CLIENT SERVER COMPUTER SYSTEMS; CONTROL SYSTEMS; REAL TIME SYSTEMS; SCANNING ELECTRON MICROSCOPY; SENSORS;

CLIENT-SERVER-BASED CONTROL SYSTEM; ROTATIONAL MANIPULATORS; SENSOR FEEDBACK;

NANOSTRUCTURED MATERIALS;

EID: 33745187608     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/.2005.1467144     Document Type: Conference Paper

References (15)

1. G. Yang, J. A. Gaines, B. J. Nelson, "A supervisory wafer-level 3D microassembly system for hybrid MEMS fabrication," Journal of Intelligent and Robotic Systems, nr. 37, Kluwer Academic Publishers, pp. 43-68, 2003
2. H. Bleuler, R. Clavel, J.-M. Breguet, H. Langen, E. Pernette, "Issues in precision motion control and microhandling," Proc. of the 2000 IEEE International Conference on Robotics & Automatisation (ICRA'00), (San Francisco, CA, U.S.A.), 2000
3. S. Martel, K. Doyle, G. Martinez, I. Hunter, S. Lafontaine, "Integrating a complex electronic system in a small scale autonomous instrumented robot: the NanoWalker project," Proc. of SPIE, Microrobotics and Microassembly, vol. 3834, (Boston, MA, U.S.A.), pp. 63-74, 1999
4. Kelvin Nanocharacterisation Centre, http://www.knc.gla.ac.uk/KNC-opening-talks-printing.pdf
5. S. Fatikow, M. Kemper, A. Kortschack, T. Sievers, J. Zenke, A. Shnirinov, and S. Hohn, "Versatile nanohandling robot cell in a scanning electron microscope," In Proc. of 12th Mediterranean Conf. on Control and Automation, 2004.
6. A. Kortschack, O. C. Hänßler, C. Rass, S. Fatikow, "Driving principles of mobile microrobots for the microand nanohandling," in Proc. of IEEE/RSJ Int. Conference of Intelligent Robots and Systems, Las Vegas, pp. 1895-1900, 2003
7. A. Kortschack, S. Fatikow, "Development of a mobile nanohandling robot," Journal of Micromechatronics, vol. 2, nr. 3, pp. 249-269, 2004
8. th European Conf. Computer Vision, 1998, pp. 5-28
9. J. MacCormick, Stochastic Algorithms for Visual Tracking, Springer, 2002
10. Matrox homepage. http:/www.matrox.com.
11. K. Mølhave, T. M. Hansen, D. N. Madsen and P. Bøggild, "Towards Pick-And-Place Manipulation of Nanostructures", Journal of Nanoscience and Nanotechnology, 4, 279-282 (2004)
12. R. Henkel, "Fast Stereovision by Coherence Detection", Proc. of CAIP'97, Kiel. LCNS 1296, eds. G. Sommer, K. Daniilidis and J. Pauli, pp. 297, LCNS 1296, Springer, Heidelberg
13. N. Qian, "Binocular Disparity and the Perception of Depth", Neuron, Vol. 18, 359-368, 1997
14. E.H. Adelson, J.R. Berger: "Spatiotemporal Energy Models for the Perception of Motion", J. Opt. Soc. Am. A 2(2), 1985, 284-299
15. S. Fatikow, A. Kortschack, H. Hülsen, T. Sievers, and T. Wich, "Towards fully automated microhandling," in Proc. Int. Workshop on Microfactories (IWMF'04), (Shanghai, China), pp. 34-39, October 2004.