Polymer-MEMS and Its Applications

ieej transactions on sensors and micromachines

Volumn 124, Issue 10, 2006, Pages 349-353

  Shoji, Shuichi ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

3D microstructure; Molding; PDMS; Photosensitive Polymer; Plastic; Polymer

Indexed keywords

EID: 85009563286     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.124.349     Document Type: Article

References (23)

1. S. Shoji: “Micromachining for biosensors and Biosensing Systems: Biosensors and Their Applications”, Kluwer Acd./Plen. Pub., New York, pp.225-241 (2000)
2. P. Renaud, S. Metz, S. Jiguet, and A. Bertsch: “Composite Photoplmner Microslructures: From Planar to 3D Device”, 12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems, Vol.2, pp.991-994 (2003)
3. A. Rogner, J. Eicher, and D. Munchmeyer et. al.: “The LIGA Technique: What are the New Opportunities”, J. Micromech. Microeng., Vol.2, pp.133-140 (1992)
4. H. Becker and U. Heim: “Hot Embossing as a Method for Fabrication of Polymer High Aspect Ratio Structure”, Sensors & Actuators, Vol.83, pp.l3-135 (2000)
5. J.-W. Choi, S. Kim, and R. Trichur, et. al.: “A Plastic Micro Injection Molding Technique using Replaceable Mold-Disks for Disposable Microfluidc Systems and Biochips”, 5th Int. Conf. On Micro Total Analysis Systems, pp.411-412 (2001)
6. S. Kim, R. Trichur, G. Beaucage, and C. H. Ahn: “New Plastic Microinjection Molding Technique for Extremely Tall Plastic Microstructures Using Remote Infrared Radiation Heating Method”, Proc. Solid-State Sensor, Actuator and Microsystems Workshop, pp.206-209 (2002)
7. K. Hosokawa, T. Fujii, and I. Endo: “Handling of Picoliter Liquid Samples in a Polydimethylsiloxane (PDMS)- Based Microfluidic Device”, Anal. Chem., Vol.71, No.20, pp.4781-4785 (1999)
8. Y. -C. Su, L. Lin, and A. P. Pisano: “A Water-Powered Micro Drag delivery System”, Proc. Solid-State Sensor, Actuator and Microsystems Workshop, pp.69-72 (2002)
9. J. S. Go, T Yamazaki, K. Kanai, H. Sato, S. Kawakami, and S. Shoji: “A disposable, dead volume-free and leak-free monohthic PDMS microvalve”, 12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems, Vol.1, pp.643-646 (2003)
10. M. Ishizuka, M. Abe, H. Houjou, S. Shoji, J. Mizuno, and Y. Wada: “Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly”, 12th Int. Conf. On Solid-State Sensors, Actuators and Microsystems, Vol.2, pp.999-1002 (2003)
11. M. Kanai, D. Uchida, S. Sugiura, Y. Shirasaki, J. S. Go, H. Nakanishi, T. Funatsu, and S. Shoji: “PDMS microfluidic devices with PTFE passivated channels”, 7th Int. Conf On Micro Total Analysis Systems, Vol.1, pp.429-432 (2003)
12. K. Ikuta, A. Takahashi, K. Ikeda, and S. Maruo: “Fully Integrated Micro Biochemical Laboratory Using Biochemical IC Chips”, IEEE 16th Int. Conf. On Micro Electro Mechanical Systems, pp.451-454 (2003)
13. O. Tabata, N. Matsuzuka, T. Yamaji, and H. You: “Fabrication of 3-Dimensional Microstructures Using Morving Mask Deep X-Ray Lithography (M2DXL)”, IEEEI4th Int. Conf On Micro Electro Mechanical Systems, pp.94-97 (2001)
14. A. Kawamura, S. Ike, and S. Shoji: “Fabrication of Fine Metal Microstructures Packaged in the Bonded Glass Substrate”, Proc. Of SPIE, Vol.3893, pp.486-493 (1999)
15. H. Sato, T. Kakinuma, J. S. Go, and S. Shoji: “A Novel Fabrication of In-Channel 3-D Micromesh Structure Using Maskless Multi-Angle Exposure and Its Microfilter Application”, IEEE16th Int. Conf. On Micro Electro Mechanical Systems, pp.223-226 (2003)
16. Y. -K. Yoon, J. -H. Park, F Cros, and M. G. Allen: “Integrated Vertical Screen Microfilter Systems Using Inclined SU-8 Structures”, IEEE16th Int. Conf. On Micro Electro Mechanical Systems, pp.227-230 (2003)
17. S. Shoji and M. Esashi: “Micro Flow Cell for Blood Gas Analysis Realizing Very Small Sample Voliane”, Sensors & Actuators B, Vol.8, pp.205-208 (1992)
18. S. Shoji, B. H. van den Schoot, N. F de Rooij, and M. Esashi: “Smallest Dead Volume Microvalves for Integrated Chemical Analysis Systems”, Tech. Dig. 6th Int. Conf. On Solid-State Sensors and Actuators, pp.1052-1055 (1991)
19. P. F. Man, D. K. Jones, and C. H. Mastrangelo: “Microfluidic Plastic Capillaries on Silicon Substrate: A New Inexpensive Technology for Bioanalysis Chips”, Proc. 10th Micro Electro Mechanical Systems Workshop, pp.311-316 (1997)
20. J. R. Webster and C. H. Mastrangelo: “Large-Volume Integrated Capillary Electrophoresis Stage Fabricated Using Micromachining of Plastic on Silicon Substrates”, Tech. Dig. 6th Int. Conf On Solid-State Sensors and Actuators, pp.503-506 (1997)
21. J. Xie, X. Yang, X. Q. Wang, and Y. -C. Tai: “Surface Micromachined Leakage Proof Parylene Check Valve”, Proc. IEEE 14th Int. Conf. On Micro Electro Mechanical Systems, pp.539-542 (2001)
22. J. Xie, J. Shih, and Y. -C. Tai: “Integrated Surface-Micromachined Mass Flow Controller”, Proc. IEEE 16th Int. Conf. On Micro Electro Mechanical Systems, pp.20-23 (2003)
23. Q. He, E. Meng, Y. -C. Tai, C. M. Rutherglen, J. Erickson, and J. Pine: “Parylene Neuro-Cages for Live Neural Networks Study”, 12” Int. Conf. On Solid-State Sensors, Actuators and Microsystems, Vol.2, pp.995-998 (2003)