Composite photopolymer microstructures: From planar to 3D devices

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 991-994

  Renaud, P ^a   Metz, S ^a   Jiguet, S ^a   Bertsch, A ^a  

^a EPFL   (Switzerland)

Author keywords

Electrodes; Etching; Laboratories; Micromechanical devices; Microstructure; Polyimides; Polymers; Resists; Sensor arrays; Silicon

Indexed keywords

ACTUATORS; ASPECT RATIO; ELECTRODES; ETCHING; LABORATORIES; MICROSTRUCTURE; MICROSYSTEMS; PHOTOPOLYMERIZATION; PHOTOPOLYMERS; POLYIMIDES; POLYMERS; SENSOR ARRAYS; SILICON; TRANSDUCERS;

HIGH ASPECT RATIO; MICRO-STEREO LITHOGRAPHY; MICROMECHANICAL DEVICE; PHOTO-DEFINABLE; PHYSICAL PROPERTIES OF POLYMERS; RESISTS; SPECIAL STRUCTURE;

SOLID-STATE SENSORS;

EID: 84874779115     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216934     Document Type: Conference Paper

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