A disposable, dead volume-free and leak-free monolithic PDMS microvalve

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 643-646

  Go, Jeung Sang ^a   Yamazaki, T ^b   Kanai, M ^a   Sato, H ^a   Kawakami, S ^a   Shoji, S ^a  

^a WASEDA UNIVERSITY   (Japan)

^b CANON INC   (Japan)

Author keywords

Bonding; Curing; Fabrication; Glass; Microchannel; Microfluidics; Microvalves; Optical surface waves; Silicon; Valves

Indexed keywords

ACTUATORS; BONDING; CURING; FABRICATION; GLASS; MICROCHANNELS; MICROFLUIDICS; MICROSYSTEMS; RESIN TRANSFER MOLDING; SILICON; SOLID-STATE SENSORS; SURFACE WAVES; TRANSDUCERS; VALVES (MECHANICAL);

BONDING STRENGTH; CURE TEMPERATURE; FABRICATION METHOD; MICRO VALVES; OPTICAL SURFACE WAVES; PDMS SUBSTRATE; SMOOTH SURFACE; VALVE CHAMBERS;

GLASS BONDING;

EID: 3042852132     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215555     Document Type: Conference Paper

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