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Volumn 2, Issue , 2003, Pages 999-1002
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Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly
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Author keywords
Assembly; Chemical analysis; Electrodes; Fabrication; Fluidic microsystems; Inductors; Microchannel; Microfluidics; Silicon; Transducers
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Indexed keywords
ACTUATORS;
ASSEMBLY;
CHEMICAL ANALYSIS;
ELECTRIC FIELD EFFECTS;
ELECTRIC FIELDS;
ELECTRIC INDUCTORS;
ELECTRODES;
FABRICATION;
MICROCHANNELS;
MICROFLUIDICS;
MICROSYSTEMS;
PHOTOLITHOGRAPHY;
SILICON;
STYRENE;
TRANSDUCERS;
EMBEDDED STRUCTURES;
FLUIDIC MICROSYSTEMS;
HIGH ELECTRIC FIELDS;
METAL LAYER;
MICRO-FLOW;
MULTI-METALS;
STATIC FIELDS;
STYRENE POLYMERS;
SOLID-STATE SENSORS;
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EID: 84944754306
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1216936 Document Type: Conference Paper |
Times cited : (2)
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References (7)
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