Growth of nanolaminates of thermoelectric Bi2Te3/Sb2Te3 by atomic layer deposition

ECS Journal of Solid State Science and Technology

Volumn 3, Issue 4, 2014, Pages P95-P100

  Nminibapiel, David ^a,b   Zhang, Kai ^a,b   Tangirala, Madhavi ^a,b   Baumgart, Helmut ^a,b   Chakravadhanula, V S K ^c,d,e   Kübel, Christian ^c,e   Kochergin, Vladimir ^f  

^a Old Dominion University   (United States)

^b THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^d HELMHOLTZ INSTITUTE ULM HIU   (Germany)

^e KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^f MicroXact Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84990913374     PISSN: 21628769     EISSN: 21628777     Source Type: Journal    
DOI: 10.1149/2.014404jss     Document Type: Conference Paper

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