Fabrication of Sb2Te3 and Bi2Te 3 multilayer composite films by atomic layer deposition

ECS Transactions

Volumn 50, Issue 13, 2013, Pages 3-9

  Zhang, Kai ^a,b   Nminibapiel, David ^a,b   Tangirala, Madhavi ^a,b   Baumgart, Helmut ^a,b   Kochergin, Vladimir ^c  

^a Old Dominion University   (United States)

^b THOMAS JEFFERSON NATIONAL ACCELERATOR FACILITY   (United States)

^c MicroXart Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIMONY COMPOUNDS; ATOMIC LAYER DEPOSITION; ATOMS; CHEMISORPTION; CHLORINE COMPOUNDS; COMPOSITE FILMS; CRYSTALLITES; FABRICATION; FILM GROWTH; FILM PREPARATION; MULTILAYER FILMS; MULTILAYERS; NUCLEATION; SILICON COMPOUNDS; TELLURIUM COMPOUNDS;

ANTIMONY TELLURIDE; BISMUTH TELLURIDE; HEXAGONAL PLATELETS; ISLAND GROWTH MODE; MULTILAYER COMPOSITE FILMS; NUCLEATION SITES; SEM ANALYSIS; TRIMETHYLSILYL;

BISMUTH COMPOUNDS;

EID: 84885757158     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05013.0003ecst     Document Type: Conference Paper

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