High sensitivity ultra-broad-band absorption spectroscopy of inductively coupled chlorine plasma

Plasma Sources Science and Technology

Volumn 25, Issue 3, 2016, Pages

  Marinov, Daniil ^a   Foucher, Mickaël ^a   Campbell, Ewen ^b   Brouard, Mark ^b   Chabert, Pascal ^a   Booth, Jean Paul ^a  

^a ECOLE POLYTECHNIQUE   (France)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

absorption spectroscopy; Cl2; ICP; negative ions; vibrational excitation

Indexed keywords

ABSORPTION SPECTROSCOPY; CHLORINE; DEGREES OF FREEDOM (MECHANICS); ELECTROMAGNETIC INDUCTION; EXCITED STATES; GROUND STATE; INDUCTIVELY COUPLED PLASMA; NEGATIVE IONS;

ABSORPTION CROSS SECTIONS; BROAD BAND ABSORPTION SPECTROSCOPY; INDUCTIVELY COUPLED CHLORINE; LINE INTEGRATED DENSITIES; RADIAL TEMPERATURE GRADIENTS; TRANSLATIONAL DEGREES OF FREEDOMS; VIBRATIONAL DISTRIBUTION; VIBRATIONAL EXCITATION;

ABSORPTION COOLING;

EID: 84973402373     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/25/3/035019     Document Type: Article

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