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Volumn 45, Issue 19, 2012, Pages

Absolute atomic chlorine densities in a Cl 2 inductively coupled plasma determined by two-photon laser-induced fluorescence with a new calibration method

Author keywords

[No Author keywords available]

Indexed keywords

ABSOLUTE DENSITY; ATOMIC CHLORINE; CALIBRATION METHOD; CHLORINE ATOM; CHLORINE GAS; CL ATOMS; GAS DENSITY; GAS PRESSURES; LASER BEAM ENERGY; RF-POWER; TRIPLED ND:YAG LASER; TWO-PHOTON LASER-INDUCED FLUORESCENCE;

EID: 84860327220     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/45/19/195201     Document Type: Article
Times cited : (24)

References (17)
  • 3
    • 0035822571 scopus 로고    scopus 로고
    • Absolute calibration of atomic density measurements by laser-induced fluorescence spectroscopy with two-photon excitation
    • DOI 10.1088/0022-3727/34/15/312, PII S0022372701238698
    • Niemi K, Schulz-von der Gathen V and Dobele H F 2001 J. Phys. D: Appl. Phys. 34 23305 (Pubitemid 32748629)
    • (2001) Journal of Physics D: Applied Physics , vol.34 , Issue.15 , pp. 2330-2335
    • Niemi, K.1    Schulz-von Der Gathen, V.2    Dobele, H.F.3
  • 14
    • 36249004278 scopus 로고    scopus 로고
    • Influence of the reactor wall composition on radicals' densities and total pressure in Cl2 inductively coupled plasmas: I. Without silicon etching
    • DOI 10.1063/1.2803880
    • Cunge G, Sadeghi N and Ramos R 2007 J. Appl. Phys. 102 093304 (Pubitemid 350128990)
    • (2007) Journal of Applied Physics , vol.102 , Issue.9 , pp. 093304
    • Cunge, G.1    Sadeghi, N.2    Ramos, R.3
  • 17
    • 85026341102 scopus 로고    scopus 로고
    • Influence of the reactor wall composition on radicals' densities and total pressure in Cl2 inductively coupled plasmas: II. during silicon etching
    • DOI 10.1063/1.2803881
    • Cunge G, Sadeghi N and Ramos R 2007 J. Appl. Phys. 102 093305 (Pubitemid 350128991)
    • (2007) Journal of Applied Physics , vol.102 , Issue.9 , pp. 093305
    • Cunge, G.1    Sadeghi, N.2    Ramos, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.