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Volumn 45, Issue 19, 2012, Pages
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Absolute atomic chlorine densities in a Cl 2 inductively coupled plasma determined by two-photon laser-induced fluorescence with a new calibration method
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Author keywords
[No Author keywords available]
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Indexed keywords
ABSOLUTE DENSITY;
ATOMIC CHLORINE;
CALIBRATION METHOD;
CHLORINE ATOM;
CHLORINE GAS;
CL ATOMS;
GAS DENSITY;
GAS PRESSURES;
LASER BEAM ENERGY;
RF-POWER;
TRIPLED ND:YAG LASER;
TWO-PHOTON LASER-INDUCED FLUORESCENCE;
ATOMS;
CHLORINE;
DISSOCIATION;
INDUCTIVELY COUPLED PLASMA;
LASER PRODUCED PLASMAS;
PHOTOLYSIS;
PHOTONS;
NEODYMIUM LASERS;
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EID: 84860327220
PISSN: 00223727
EISSN: 13616463
Source Type: Journal
DOI: 10.1088/0022-3727/45/19/195201 Document Type: Article |
Times cited : (24)
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References (17)
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