Atomic Layer Deposition of MnS: Phase Control and Electrochemical Applications

ACS Applied Materials and Interfaces

Volumn 8, Issue 4, 2016, Pages 2774-2780

  Riha, Shannon C ^a   Koegel, Alexandra A ^a   Meng, Xiangbo ^b   Kim, In Soo ^b   Cao, Yanqiang ^b   Pellin, Michael J ^b   Elam, Jeffrey W ^b   Martinson, Alex B F ^b  

^a UNIVERSITY OF WISCONSIN STEVENS POINT   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

ALD for batteries; atomic layer deposition; manganese sulfide; metal sulfide ALD; MnS battery anode; thin film batteries; MnS; MnS

Indexed keywords

ANODES; ATOMS; DEPOSITION; ELECTRODES; LITHIUM-ION BATTERIES; MANGANESE; MASS SPECTROMETRY; QUARTZ CRYSTAL MICROBALANCES; SULFUR COMPOUNDS; THIN FILMS;

BATTERY ANODES; ELECTROCHEMICAL APPLICATIONS; MANGANESE SULFIDE; METAL SULFIDES; QUADRUPOLE MASS SPECTROMETRY; SELF-CONSISTENT REACTIONS; SITU QUARTZ CRYSTAL MICROBALANCE; THIN FILM BATTERY;

ATOMIC LAYER DEPOSITION;

EID: 84957916589     PISSN: 19448244     EISSN: 19448252     Source Type: Journal    
DOI: 10.1021/acsami.5b11075     Document Type: Article

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