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Volumn 6, Issue , 2015, Pages

A small-gap electrostatic micro-actuator for large deflections

Author keywords

[No Author keywords available]

Indexed keywords

DEFLECTION; ELECTRODE; SEPARATION;

EID: 84949895174     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms10078     Document Type: Article
Times cited : (112)

References (20)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.