Atomic layer deposition of Pd and Pt nanoparticles for catalysis: On the mechanisms of nanoparticle formation

Nanotechnology

Volumn 27, Issue 3, 2015, Pages

  Mackus, Adriaan J M ^a   Weber, Matthieu J ^a   Thissen, Nick F W ^a   Garcia Alonso, Diana ^a   Vervuurt, René H J ^a   Assali, Simone ^a   Bol, Ageeth A ^a   Verheijen, Marcel A ^a,b   Kessels, Wilhelmus M M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

atomic layer deposition; catalysis; nanoparticles; nanostructures; palladium; platinum; thin film

Indexed keywords

ATOMS; CATALYSIS; DEPOSITION; ELECTRON SPECTROSCOPY; METAL NANOPARTICLES; NANOPARTICLES; NANOSTRUCTURES; PALLADIUM; PARTICLE SIZE; PARTICLE SIZE ANALYSIS; PLATINUM; SYNTHESIS (CHEMICAL); THIN FILMS;

GROWTH CHARACTERISTIC; LARGE SURFACE AREA; NANOPARTICLE FORMATION; NANOPARTICLE PROPERTIES; NUCLEATION STAGES; PROCESSING CONDITION; REACTION MECHANISM; TRANSMISSION ELECTRON;

ATOMIC LAYER DEPOSITION;

EID: 84949894921     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/27/3/034001     Document Type: Article

References (47)

1. Zaera F 2012 Catal. Lett. 142 501
2. Stair P C 2008 J. Chem. Phys. 128 182507
3. George S M 2010 Chem. Rev. 110 111
4. O'Neill B J, Jackson D H K, Lee J, Canlas C, Stair P C, Marshall C L, Elam J W, Kuech T F, Dumesic J A and Huber G W 2015 ACS Catal. 5 1804
5. Christensen S T, Feng H, Libera J L, Guo N, Miller J T, Stair P C and Elam J W 2010 Nano Lett. 10 3047
6. Weber M J, Mackus A J M, Verheijen M A, van der Marel C and Kessels W M M 2012 Chem. Mater. 24 2973
7. Lei Y et al 2012 Chem. Mater. 24 3525
8. King J S, Wittstock A, Biener J, Kucheyev S O, Wang Y M, Baumann T F, Giri S K, Hamza A V, Baeumer M and Bent S F 2008 Nano Lett. 8 2405
9. Setthapun W et al 2010 J. Phys. Chem. C 114 9758
10. Enterkin J A, Setthapun W, Elam J W, Christensen S T, Rabu F A, Marks L D, Stair P C, Poeppelmeier K R and Marshall C L 2011 ACS Catal. 1 629
11. Lu J, Fu B, Kung M C, Xiao G, Elam J W, Kung H H and Stair P C 2012 Science 335 1205
12. Rikkinen E, Santasalo-Aarnio A, Airaksinen S, Borghei M, Viitanen V, Sainio J, Kauppinen E I, Kallio T and Krause A O I 2011 J. Phys. Chem. C 115 23067
13. Feng H, Elam J W, Libera J A, Setthapun W and Stair P C 2010 Chem. Mater. 22 3133
14. Johansson A-C, Yang R B, Haugshøj K B, Larsen J V, Christensen L H and Thomsen E V 2013 Int. J. Hydrog. Energy 38 11406
15. Johansson A C, Larsen J V, Verheijen M A, Haugshøj K B, Clausen H F, Kessels W M M, H Christensen L and Thomsen E V 2014 J. Catal. 311 481
16. Mackus A J M, Verheijen M A, Leick N, Bol A A and Kessels W M M 2013 Chem. Mater. 25 1905
17. Lu J, Low K-B, Lei Y, Libera J A, Nicholls A, Stair P C and Elam J W 2014 Nat. Commun. 5 3264
18. Aaltonen T, Rahtu A, Ritala M and Leskela M 2003 6 C130 Electrochem. Solid-State Lett.
19. Kessels W M M, Knoops H C M, Dielissen S A F, Mackus A J M and van de Sanden M C M 2009 Appl. Phys. Lett. 95 013114
20. Mackus A J M, Leick N, Baker L and Kessels W M M 2012 Chem. Mater. 24 1752
21. Assali S et al 2013 Nano Lett. 13 1559
22. Weber M J, Verheijen M A, Bol A A and Kessels W M M 2015 Nanotechnology 26 094002
23. Mackus A J M, Thissen N F W, Mulders J J L, Trompenaars P H F, Verheijen M A, Bol A A and Kessels W M M 2013 J. Phys. Chem. C 117 10788
24. Liang X, Li J, Yu M, McMurray C N, Falconer J L and Weimer A W 2011 ACS Catal. 1 1162
25. Gao L, Cui Y, Wang J, Cavalli A, Standing A, Vu T T T, Verheijen M A, Haverkort J E M, Bakkers E P A M and Notten P H L 2014 Nano Lett. 14 3715
26. Dasgupta N P, Liu C, Andrews S, Prinz F B and Yang P 2013 J. Am. Chem. Soc. 135 12932
27. Hu S, Shaner M R, Beardslee J A, Lichterman M, Brunschwig B S and Lewis N S 2014 Science 344 1005
28. Lu J, Liu B, Guisinger N P, Stair P C, Greeley J P and Elam J W 2014 Chem. Mater. 26 6752
29. Weber M J, Mackus A J M, Verheijen M A, Longo V, Bol A A and Kessels W M M 2014 J. Phys. Chem. C 118 8702
30. Ten Eyck G A, Senkevich J J, Tang F, Liu D, Pimanpang S, Karaback T, Wang G C, Lu T M, Jezewski C and Lanford W A 2005 Chem. Vapor Depos. 11 60
31. Freyschlag C G and Madix R J 2011 Mater. Today 14 134
32. Aaltonen T, Ritala M, Sajavaara T, Keinonen J and Leskela M 2003 Chem. Mater. 15 1924
33. Mackus A J M, Garcia-Alonso D, Knoops H C M, Bol A A and Kessels W M M 2013 Chem. Mater. 25 1769
34. Knoops H C M, Mackus A J M, Donders M E, van de Sanden M C M, Notten P H L and Kessels W M M 2009 Electrochem. Solid-State Lett. 12 G34
35. Garcia-Alonso D, Zardetto V, Mackus A J M, De Rossi F, Verheijen M A, Brown T M, Kessels W M M and Creatore M 2014 Adv. Energy Mater. 4 1
36. Campbell C T 1997 Surf. Sci. Rep. 27 111
37. Zhou Y, Muhich C L, Neltner B T, Weimer A W and Musgrave C B 2012 J. Phys. Chem. C 116 12114
38. Mackus A J M, Bol A A and Kessels W M M 2013 ECS Trans. 58 183
39. Geyer S M, Methaapanon R, Shong B, Pianetta P A and Bent S F 2013 J. Phys. Chem. Lett. 4 176
40. Parmeter J E 1993 J. Phys. Chem. 97 11530
41. Geyer S M, Methaapanon R, Johnson R, Brennan S, Toney M F, Clemens B and Bent S F 2014 J. Appl. Phys. 116 064905
42. Gallezot P, Leclercq C, Barbier J and Marecot P 1989 J. Catal. 116 164
43. Christensen S T, Elam J W, Lee B, Feng Z, Bedzyk M J and Hersam M C 2009 Chem. Mater. 21 516
44. Christensen S T et al 2009 Small 5 750
45. Liang X and Jiang C 2013 J. Nanoparticle Res. 15 1890
46. Li J, Liang X, King D M, Jiang Y-B and Weimer A W 2010 Appl. Catal. B 97 220
47. Lubers A M, Muhich C L, Anderson K M and Weimer A W 2015 J. Nanopart. Res. 17 179