-
1
-
-
84872720025
-
Plasma Etch Transfer of Self-Assembled Polymer Patterns
-
Johnston, D. E.; Lu, M.; Black, C. T. Plasma Etch Transfer of Self-Assembled Polymer Patterns Proc. SPIE 2012, 8328, 83280A-8
-
(2012)
Proc. SPIE
, vol.8328
, pp. 83280A-83288A
-
-
Johnston, D.E.1
Lu, M.2
Black, C.T.3
-
2
-
-
78649834544
-
Nanoscopic Patterned Materials with Tunable Dimensions Via Atomic Layer Deposition on Block Copolymers
-
Peng, Q.; Tseng, Y.-C.; Darling, S. B.; Elam, J. W. Nanoscopic Patterned Materials with Tunable Dimensions Via Atomic Layer Deposition on Block Copolymers Adv. Mater. 2010, 22, 5129-5133
-
(2010)
Adv. Mater.
, vol.22
, pp. 5129-5133
-
-
Peng, Q.1
Tseng, Y.-C.2
Darling, S.B.3
Elam, J.W.4
-
3
-
-
79959784768
-
A Route to Nanoscopic Materials Via Sequential Infiltration Synthesis on Block Copolymer Templates
-
Peng, Q.; Tseng, Y.-C.; Darling, S. B.; Elam, J. W. A Route to Nanoscopic Materials Via Sequential Infiltration Synthesis on Block Copolymer Templates ACS Nano 2011, 5, 4600-4606
-
(2011)
ACS Nano
, vol.5
, pp. 4600-4606
-
-
Peng, Q.1
Tseng, Y.-C.2
Darling, S.B.3
Elam, J.W.4
-
4
-
-
84870340211
-
Image Quality and Pattern Transfer in Directed Self Assembly with Block-Selective Atomic Layer Deposition
-
Ruiz, R.; Wan, L.; Lille, J.; Patel, K. C.; Dobisz, E.; Johnston, D. E.; Kisslinger, K.; Black, C. T. Image Quality and Pattern Transfer in Directed Self Assembly with Block-Selective Atomic Layer Deposition J. Vac. Sci. Technol., B 2012, B30, 06F202
-
(2012)
J. Vac. Sci. Technol., B
, vol.30
, pp. 06F202
-
-
Ruiz, R.1
Wan, L.2
Lille, J.3
Patel, K.C.4
Dobisz, E.5
Johnston, D.E.6
Kisslinger, K.7
Black, C.T.8
-
5
-
-
79961131344
-
Enhanced Polymeric Lithography Resists Via Sequential Infiltration Synthesis
-
Tseng, Y.-C.; Peng, Q.; Ocola, L. E.; Czaplewski, D. A.; Elam, J. W.; Darling, S. B. Enhanced Polymeric Lithography Resists Via Sequential Infiltration Synthesis J. Mater. Chem. 2011, 21, 11722-11725
-
(2011)
J. Mater. Chem.
, vol.21
, pp. 11722-11725
-
-
Tseng, Y.-C.1
Peng, Q.2
Ocola, L.E.3
Czaplewski, D.A.4
Elam, J.W.5
Darling, S.B.6
-
6
-
-
84255183804
-
Etch Properties of Resists Modified by Sequential Infiltration Synthesis
-
Tseng, Y.-C.; Peng, Q.; Ocola, L. E.; Czaplewski, D. A.; Elam, J. W.; Darling, S. B. Etch Properties of Resists Modified by Sequential Infiltration Synthesis J. Vac. Sci. Technol., B 2011, 29, 06FG01-1-06FG01-4
-
(2011)
J. Vac. Sci. Technol., B
, vol.29
, pp. 06FG011-06FG014
-
-
Tseng, Y.-C.1
Peng, Q.2
Ocola, L.E.3
Czaplewski, D.A.4
Elam, J.W.5
Darling, S.B.6
-
7
-
-
84872851940
-
Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures
-
Kamcev, J.; Germack, D. S.; Nykypanchuk, D.; Grubbs, R. B.; Nam, C.-Y.; Black, C. T. Chemically Enhancing Block Copolymers for Block-Selective Synthesis of Self-Assembled Metal Oxide Nanostructures ACS Nano 2012, 7, 339-346
-
(2012)
ACS Nano
, vol.7
, pp. 339-346
-
-
Kamcev, J.1
Germack, D.S.2
Nykypanchuk, D.3
Grubbs, R.B.4
Nam, C.-Y.5
Black, C.T.6
-
8
-
-
84875832412
-
Emerging Trends in Metal-Containing Block Copolymers: Synthesis, Self-Assembly, and Nanomanufacturing Applications
-
Ramanathan, M.; Tseng, Y.-C.; Ariga, K.; Darling, S. B. Emerging Trends in Metal-Containing Block Copolymers: Synthesis, Self-Assembly, and Nanomanufacturing Applications J. Mater. Chem. C 2013, 1, 2080-2091
-
(2013)
J. Mater. Chem. C
, vol.1
, pp. 2080-2091
-
-
Ramanathan, M.1
Tseng, Y.-C.2
Ariga, K.3
Darling, S.B.4
-
9
-
-
80052565794
-
Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis
-
Tseng, Y.-C.; Peng, Q.; Ocola, L. E.; Elam, J. W.; Darling, S. B. Enhanced Block Copolymer Lithography Using Sequential Infiltration Synthesis J. Phys. Chem. C 2011, 115, 17725-17729
-
(2011)
J. Phys. Chem. C
, vol.115
, pp. 17725-17729
-
-
Tseng, Y.-C.1
Peng, Q.2
Ocola, L.E.3
Elam, J.W.4
Darling, S.B.5
-
10
-
-
84863931824
-
Quantitative in Situ Infrared Analysis of Reactions between Trimethylaluminum and Polymers during Al2o3 Atomic Layer Deposition
-
Gong, B.; Parsons, G. N. Quantitative in Situ Infrared Analysis of Reactions between Trimethylaluminum and Polymers During Al2o3 Atomic Layer Deposition J. Mater. Chem. 2012, 22, 15672-15682
-
(2012)
J. Mater. Chem.
, vol.22
, pp. 15672-15682
-
-
Gong, B.1
Parsons, G.N.2
-
11
-
-
84875852783
-
2 Nanostructures by Sequential Vapour Infiltration of Block Copolymer Micellar Films in an Atomic Layer Deposition Reactor
-
2 Nanostructures by Sequential Vapour Infiltration of Block Copolymer Micellar Films in an Atomic Layer Deposition Reactor J. Mater. Chem. C 2013, 1, 1029-1036
-
(2013)
J. Mater. Chem. C
, vol.1
, pp. 1029-1036
-
-
Yin, J.1
Xu, Q.2
Wang, Z.3
Yao, X.4
Wang, Y.5
-
12
-
-
84885481453
-
Mechanisms and Reactions during Atomic Layer Deposition on Polymers
-
Parsons, G. N. et al. Mechanisms and Reactions During Atomic Layer Deposition on Polymers Coord. Chem. Rev. 2013, 257, 3323-3331
-
(2013)
Coord. Chem. Rev.
, vol.257
, pp. 3323-3331
-
-
Parsons, G.N.1
-
13
-
-
84922447851
-
New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy
-
Biswas, M.; Libera, J. A.; Darling, S. B.; Elam, J. W. New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy Chem. Mater. 2014, 26, 6135-6141
-
(2014)
Chem. Mater.
, vol.26
, pp. 6135-6141
-
-
Biswas, M.1
Libera, J.A.2
Darling, S.B.3
Elam, J.W.4
-
14
-
-
84874011948
-
Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition
-
Comstock, D. J.; Elam, J. W. Mechanistic Study of Lithium Aluminum Oxide Atomic Layer Deposition J. Phys. Chem. C 2013, 117, 1677-1683
-
(2013)
J. Phys. Chem. C
, vol.117
, pp. 1677-1683
-
-
Comstock, D.J.1
Elam, J.W.2
-
15
-
-
64349109641
-
3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry
-
3 Atomic Layer Deposition with Trimethylaluminum and Ozone Studied by in Situ Transmission FTIR Spectroscopy and Quadrupole Mass Spectrometry J. Phys. Chem. C 2008, 112, 19530-19539
-
(2008)
J. Phys. Chem. C
, vol.112
, pp. 19530-19539
-
-
Goldstein, D.N.1
McCormick, J.A.2
George, S.M.3
-
16
-
-
0026140033
-
Thin-Film Behavior of Poly(Methyl Methacrylates). 2. An FT-IR Study of Langmuir-Blodgett Films of Isotactic Pmma
-
Brinkhuis, R. H. G.; Schouten, A. J. Thin-Film Behavior of Poly(Methyl Methacrylates). 2. An FT-IR Study of Langmuir-Blodgett Films of Isotactic Pmma Macromolecules 1991, 24, 1496-1504
-
(1991)
Macromolecules
, vol.24
, pp. 1496-1504
-
-
Brinkhuis, R.H.G.1
Schouten, A.J.2
-
17
-
-
58349088124
-
Investigation on Electrical Properties of Thermally Aged Pmma by Combined Use of FTIR and Impedance Spectroscopies
-
Namouchi, F.; Smaoui, H.; Fourati, N.; Zerrouki, C.; Guermazi, H.; Bonnet, J. J. Investigation on Electrical Properties of Thermally Aged Pmma by Combined Use of FTIR and Impedance Spectroscopies J. Alloy. Compd. 2009, 469, 197-202
-
(2009)
J. Alloy. Compd.
, vol.469
, pp. 197-202
-
-
Namouchi, F.1
Smaoui, H.2
Fourati, N.3
Zerrouki, C.4
Guermazi, H.5
Bonnet, J.J.6
-
19
-
-
0035127775
-
Structural Modification of Poly(Methyl Methacrylate) by Proton Irradiation
-
Choi, H. W.; Woo, H. J.; Hong, W.; Kim, J. K.; Lee, S. K.; Eum, C. H. Structural Modification of Poly(Methyl Methacrylate) by Proton Irradiation Appl. Surf. Sci. 2001, 169-170, 433-437
-
(2001)
Appl. Surf. Sci.
, vol.169-170
, pp. 433-437
-
-
Choi, H.W.1
Woo, H.J.2
Hong, W.3
Kim, J.K.4
Lee, S.K.5
Eum, C.H.6
-
21
-
-
84947579593
-
-
In, Proceedings of the SPIE 8th International Conference on Fourier Transform Spectroscopy, Lübeck-Travemünde, Germany, Sept 1-6, 1991
-
Solli, K.-A.; Ystenes, M.; Sobota, P. In FTIR Studies of Titanium Tetrachioride- and Magnesium Dichioride-Complexes with Aromatic Esters Relevant to Ziegler-Natta Catalysts, Proceedings of the SPIE 8th International Conference on Fourier Transform Spectroscopy, Lübeck-Travemünde, Germany, Sept 1-6, 1991; p 608.
-
FTIR Studies of Titanium Tetrachioride- And Magnesium Dichioride-Complexes with Aromatic Esters Relevant to Ziegler-Natta Catalysts
, pp. 608
-
-
Solli, K.-A.1
Ystenes, M.2
Sobota, P.3
-
22
-
-
84880143886
-
Synthesis of Poly (Methyl Methacrylate)-B-Polystyrene with High Molecular Weight by Dpe Seeded Emulsion Polymerization and Its Application in Proton Exchange Membrane
-
Wang, W.; Zhang, H.; Geng, W.; Gu, J.; Zhou, Y.; Zhang, J.; Zhang, Q. Synthesis of Poly (Methyl Methacrylate)-B-Polystyrene with High Molecular Weight by Dpe Seeded Emulsion Polymerization and Its Application in Proton Exchange Membrane J. Colloid Interface Sci. 2013, 406, 154-164
-
(2013)
J. Colloid Interface Sci.
, vol.406
, pp. 154-164
-
-
Wang, W.1
Zhang, H.2
Geng, W.3
Gu, J.4
Zhou, Y.5
Zhang, J.6
Zhang, Q.7
-
23
-
-
0001119810
-
Spectroscopy of Polystyrene and Poly(Vinyl Methyl Ether) Blends
-
Lu, F. J.; Benedetti, E.; Hsu, S. L. Spectroscopy of Polystyrene and Poly(Vinyl Methyl Ether) Blends Macromolecules 1983, 16, 1525-1529
-
(1983)
Macromolecules
, vol.16
, pp. 1525-1529
-
-
Lu, F.J.1
Benedetti, E.2
Hsu, S.L.3
-
24
-
-
0011254130
-
Origins of Characteristic Bands in the Infrared Spectra of Isotactic Polystyrene and Isotactic Poly (Ring-D5 Styrene)
-
Onishi, T.; Krimm, S. Origins of Characteristic Bands in the Infrared Spectra of Isotactic Polystyrene and Isotactic Poly (Ring-D5 Styrene) J. Appl. Phys. 1961, 32, 2320-2325
-
(1961)
J. Appl. Phys.
, vol.32
, pp. 2320-2325
-
-
Onishi, T.1
Krimm, S.2
-
25
-
-
0000884665
-
Surface Phonons in Thin Aluminum Oxide Films: Thickness, Beam-Energy, and Symmetry-Mixing Effects
-
Frederick, B. G.; Apai, G.; Rhodin, T. N. Surface Phonons in Thin Aluminum Oxide Films: Thickness, Beam-Energy, and Symmetry-Mixing Effects Phys. Rev. B 1991, 44, 1880-1890
-
(1991)
Phys. Rev. B
, vol.44
, pp. 1880-1890
-
-
Frederick, B.G.1
Apai, G.2
Rhodin, T.N.3
-
26
-
-
84905686587
-
Temperature-Dependent Infiltration of Polymers during Sequential Exposures to Trimethylaluminum
-
Padbury, R. P.; Jur, J. S. Temperature-Dependent Infiltration of Polymers During Sequential Exposures to Trimethylaluminum Langmuir 2014, 30, 9228-9238
-
(2014)
Langmuir
, vol.30
, pp. 9228-9238
-
-
Padbury, R.P.1
Jur, J.S.2
|