New insight into the mechanism of sequential infiltration synthesis from infrared spectroscopy

Chemistry of Materials

Volumn 26, Issue 21, 2014, Pages 6135-6141

  Biswas, Mahua ^a   Libera, Joseph A ^a   Darling, Seth B ^a,b   Elam, Jeffrey W ^a  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BLOCK COPOLYMERS; COPOLYMERS; DENSITY FUNCTIONAL THEORY; ESTERS; INFRARED SPECTROSCOPY; LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL);

BLOCK COPOLYMER FILMS; BLOCK COPOLYMER LITHOGRAPHY; EXPOSURE CONDITIONS; FOURIER TRANSFORM INFRARED; INTERMEDIATE COMPLEX; POLY(METHYL METHACRYLATE) (PMMA); SPECTROSCOPIC MEASUREMENTS; TWO-STEP REACTIONS;

FOURIER TRANSFORM INFRARED SPECTROSCOPY;

EID: 84922447851     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm502427q     Document Type: Article

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