Temperature-dependent infiltration of polymers during sequential exposures to trimethylaluminum

Langmuir

Volumn 30, Issue 30, 2014, Pages 9228-9238

  Padbury, Richard P ^a   Jur, Jesse S ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; ESTERS; GROWTH (MATERIALS); INORGANIC COATINGS; ORGANIC POLYMERS;

EXPOSURE TEMPERATURE; POLY(ACRYLIC ACID ); POLYMER SUBSTRATE; PROCESS CONDITION; QUARTZ CRYSTAL MICROGRAVIMETRY; SATURATION BEHAVIOR; TEMPERATURE DEPENDENT; TRIMETHYLALUMINUM;

INTERFACES (MATERIALS);

EID: 84905686587     PISSN: 07437463     EISSN: 15205827     Source Type: Journal    
DOI: 10.1021/la501679f     Document Type: Article

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