Occupational Exposure to Airborne Nanomaterials: An Assessment of Worker Exposure to Aerosolized Metal Oxide Nanoparticles in Semiconductor Wastewater Treatment

Journal of Occupational and Environmental Hygiene

Volumn 12, Issue 7, 2015, Pages 469-481

  Brenner, Sara A ^a   Neu Baker, Nicole M ^a   Caglayan, Cihan ^b   Zurbenko, Igor G ^b  

^a SUNY POLYTECHNIC INSTITUTE   (United States)

^b UNIVERSITY AT ALBANY   (United States)

Author keywords

Chemical mechanical planarization; Engineered nanomaterials; Nanometal oxides; Occupational exposure assessment; Semiconductor fabrication

Indexed keywords

AIR POLLUTANT; METAL NANOPARTICLE; NANOMATERIAL; OXIDE; PARTICULATE MATTER; WASTE WATER;

AIR POLLUTANT; ANALYSIS; CHEMISTRY; ENVIRONMENTAL MONITORING; EXPOSURE; HUMAN; OCCUPATIONAL EXPOSURE; PARTICULATE MATTER; PROCEDURES; SEMICONDUCTOR; SEWAGE; WASTE WATER;

AIR POLLUTANTS, OCCUPATIONAL; ENVIRONMENTAL MONITORING; HUMANS; INHALATION EXPOSURE; METAL NANOPARTICLES; NANOSTRUCTURES; OCCUPATIONAL EXPOSURE; OXIDES; PARTICULATE MATTER; SEMICONDUCTORS; WASTE DISPOSAL, FLUID; WASTE WATER;

EID: 84933051905     PISSN: 15459624     EISSN: 15459632     Source Type: Journal    
DOI: 10.1080/15459624.2015.1018515     Document Type: Article

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