Physical, chemical, and in vitro toxicological characterization of nanoparticles in chemical mechanical planarization suspensions used in the semiconductor industry: Towards environmental health and safety assessments

Environmental Science: Nano

Volumn 2, Issue 3, 2015, Pages 227-244

  Speed, David ^a   Westerhoff, Paul ^b   Sierra Alvarez, Reyes ^c   Draper, Rockford ^d   Pantano, Paul ^d   Aravamudhan, Shyam ^e   Chen, Kai Loon ^f   Hristovski, Kiril ^b   Herckes, Pierre ^b   Bi, Xiangyu ^b   Yang, Yu ^b   Zeng, Chao ^c   Otero Gonzalez, Lila ^c   Mikoryak, Carole ^d   Wilson, Blake A ^d   Kosaraju, Karshak ^e   Tarannum, Mubin ^e   Crawford, Steven ^e   Yi, Peng ^f,k   Liu, Xitong ^f   Babu, S V ^g   Moinpour, Mansour ^h   Ranville, James ⁱ   Montano, Manuel ⁱ   Corredor, Charlie ^j   Posner, Jonathan ^j   Shadman, Farhang ^c   more..

^a IBM MICROELECTRONICS   (United States)

^b Arizona State University   (United States)

^c UNIVERSITY OF ARIZONA   (United States)

^d UNIVERSITY OF TEXAS AT DALLAS   (United States)

^e NORTH CAROLINA A AND T STATE UNIVERSITY   (United States)

^f JOHNS HOPKINS UNIVERSITY   (United States)

^g CLARKSON UNIVERSITY   (United States)

^h INTEL CORPORATION   (United States)

ⁱ Department of Geology and Geological Engineering   (United States)

^j UNIVERSITY OF WASHINGTON   (United States)

^k Florida Atlantic Univ   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84930943695     PISSN: 20518153     EISSN: 20518161     Source Type: Journal    
DOI: 10.1039/c5en00046g     Document Type: Review

References (85)

1. A. A. Keller A. Lazareva Predicted releases of engineered nanomaterials:From global to regional to local Environ. Sci. Technol. Lett. 2014 1 1 65 70
2. A. Kroll C. Dierker C. Rommel D. Hahn W. Wohlleben C. Schulze-Isfort C. Goebbert M. Voetz F. Hardinghaus J. Schnekenburger Cytotoxicity screening of 23 engineered nanomaterials using a test matrix of ten cell lines and three different assays Part. Fibre Toxicol. 2011 8
3. A. D. Maynard D. B. Warheit M. A. Philbert The New Toxicology of Sophisticated Materials: Nanotoxicology and Beyond Toxicol. Sci. 2011 120 S109 S129
4. A. E. Nel E. Nasser H. Godwin D. Avery T. Bahadori L. Bergeson E. Beryt J. C. Bonner D. Boverhof J. Carter V. Castranova J. R. DeShazo S. M. Hussain A. B. Kane F. Klaessig E. Kuempel M. Lafranconi R. Landsiedel T. Malloy M. B. Miller J. Morris K. Moss G. Oberdorster K. Pinkerton R. C. Pleus J. A. Shatkin R. Thomas T. Tolaymat A. Wang J. Wong A Multi-Stakeholder Perspective on the Use of Alternative Test Strategies for Nanomaterial Safety Assessment ACS Nano 2013 7 8 6422 6433
5. G. Oberdorster Safety assessment for nanotechnology and nanomedicine: concepts of nanotoxicology J. Intern. Med. 2010 267 1 89 105
6. R. D. Handy G. Cornelis T. Fernandes O. Tsyusko A. Decho T. Sabo-Attwood C. Metcalfe J. A. Steevens S. J. Klaine A. A. Koelmans N. Horne Ecotoxicity test methods for engineered nanomaterials: Practical experiences and recommendations from the bench Environ. Toxicol. Chem. 2012 31 1 15 31
7. F. von der Kammer P. L. Ferguson P. A. Holden A. Masion K. R. Rogers S. J. Klaine A. A. Koelmans N. Horne J. M. Unrine Analysis of engineered nanomaterials in complex matrices (environment and biota): General considerations and conceptual case studies Environ. Toxicol. Chem. 2012 31 1 32 49
8. H. P. Jarvie H. Al-Obaidi S. M. King M. J. Bowes M. J. Lawrence A. F. Drake M. A. Green P. J. Dobson Fate of Silica Nanoparticles in Simulated Primary Wastewater Treatment Environ. Sci. Technol. 2009 43 22 8622 8628
9. L. K. Limbach R. Bereiter E. Mueller R. Krebs R. Gaelli W. J. Stark Removal of oxide nanoparticles in a model wastewater treatment plant: Influence of agglomeration and surfactants on clearing efficiency Environ. Sci. Technol. 2008 42 15 5828 5833
10. F. Gomez-Rivera J. A. Field D. Brown R. Sierra-Alvarez Fate of cerium dioxide (CeO2) nanoparticles in municipal wastewater during activated sludge treatment Bioresour. Technol. 2012 108 300 304
11. M. A. Kiser P. Westerhoff T. Benn Y. Wang J. Perez-Rivera K. Hristovski Titanium Nanomaterial Removal and Release from Wastewater Treatment Plants Environ. Sci. Technol. 2009 43 17 6757 6763
12. 2 Nanomaterials J. Environ. Monit. 2011 13 5 1195 1203
13. L. E. Barton M. Auffan M. Bertrand M. Barakat C. Santaella A. Masion D. Borschneck L. Olivi N. Roche M. R. Wiesner J.-Y. Bottero Transformation of Pristine and Citrate-Functionalized CeO2 Nanoparticles in a Laboratory-Scale Activated Sludge Reactor Environ. Sci. Technol. 2014 48 13 7289 7296
14. J. Rottman F. Shadman R. Sierra-Alvarez Interactions of inorganic oxide nanoparticles with sewage biosolids Water Sci. Technol. 2012 66 9 1821 1827
15. M. R. Wiesner G. V. Lowry E. Casman P. M. Bertsch C. W. Matson R. T. Di Giulio J. Liu M. F. Hochella Jr. Meditations on the Ubiquity and Mutability of Nano-Sized Materials in the Environment ACS Nano 2011 5 11 8466 8470
16. C. F. Conrad G. A. Icopini H. Yasuhara J. Z. Bandstra S. L. Brantley P. J. Heaney Modeling the kinetics of silica nanocolloid formation and precipitation in geologically relevant aqueous solutions Geochim. Cosmochim. Acta 2007 71 3 531 542
17. M. Krishnan J. W. Nalaskowski L. M. Cook Chemical mechanical planarization: slurry chemistry, materials, and mechanisms Chem. Rev. 2010 110 1 178 204
18. P. B. Zantye A. Kumar A. K. Sikder Chemical mechanical planarization for microelectronics applications Mater. Sci. Eng., R 2004 45 3-6 89 220
19. R. K. Singh R. Bajaj Advances in chemical-mechanical planarization MRS Bull. 2002 27 10 743 751
20. X. Feng D. C. Sayle Z. L. Wang M. S. Paras B. Santora A. C. Sutorik T. X. Sayle Y. Yang Y. Ding X. Wang Converting ceria polyhedral nanoparticles into single-crystal nanospheres Science 2006 312 5779 1504 1508
21. K. H. Brown D. A. Grose R. C. Lange T. H. Ning P. A. Totta Advancing the state of the art in high-performance logic and array technology IBM J. Res. Dev. 1992 36 5 821 828
22. M. Krishnan J. W. Nalaskowski L. M. Cook Chemical mechanical planarization: slurry chemistry, materials, and mechanisms Chem. Rev. 2009 110 1 178 204
23. P. B. Zantye A. Kumar A. Sikder Chemical mechanical planarization for microelectronics applications Mater. Sci. Eng., R 2004 45 3 89 220
24. Y. Liu K. Zhang F. Wang W. Di Investigation on the final polishing slurry and technique of silicon substrate in ULSI Microelectron. Eng. 2003 66 1 438 444
25. R. K. Willardson, E. R. Weber, S. M. H. Li and R. M. Miller, Chemical mechanical polishing in silicon processing, Academic press:, 1999, vol. 63
26. R. K. Iler, The chemistry of silica: solubility, polymerization, colloid and surface properties, and biochemistry, 1979
27. W. Stöber A. Fink E. Bohn Controlled growth of monodisperse silica spheres in the micron size range J. Colloid Interface Sci. 1968 26 1 62 69
28. Z. L. Wang X. Feng Polyhedral shapes of CeO2 nanoparticles J. Phys. Chem. B 2003 107 49 13563 13566
29. D. J. Schroeder, K. J. Moeggenborg, H. Chou, J. P. Chamberlain, J. D. Hawkins and P. Carter, CMPmethod utilizing amphiphilic nonionic surfactants, In Google Patents, 2005
30. C. M. Coetsier F. Testa E. Carretier M. Ennahali B. Laborie C. Mouton-arnaud O. Fluchere P. Moulin Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing Appl. Surf. Sci. 2011 257 14 6163 6170
31. F. Testa C. Coetsier E. Carretier M. Ennahali B. Laborie C. Serafino F. Bulgarelli P. Moulin Retreatment of silicon slurry by membrane processes J. Hazard. Mater. 2011 192 2 440 450
32. X. L. Song N. Jiang Y. K. Li D. Y. Xu G. Z. Qiu Synthesis of CeO2-coated SiO2 nanoparticle and dispersion stability of its suspension Mater. Chem. Phys. 2008 110 1 128 135
33. M. Elimelech, J. Gregory, X. Jia and R. A. Williams, Particle Deposition and Aggregation-Measurement, Modelling and Simulation, In Butterworth-Heinemann, Oxford: England, 1995
34. C. Degueldre P. Y. Favarger S. Wold Gold colloid analysis by inductively coupled plasma-mass spectrometry in a single particle mode Anal. Chim. Acta 2006 555 2 263 268
35. H. E. Pace N. J. Rogers C. Jarolimek V. A. Coleman C. P. Higgins J. F. Ranville Determining Transport Efficiency for the Purpose of Counting and Sizing Nanoparticles via Single Particle Inductively Coupled Plasma Mass Spectrometry Anal. Chem. 2011 83 24 9361 9369
36. H. E. Pace N. J. Rogers C. Jarolimek V. A. Coleman E. P. Gray C. P. Higgins J. F. Ranville Single particle inductively coupled plasma-mass spectrometry: a performance evaluation and method comparison in the determination of nanoparticle size Environ. Sci. Technol. 2012 46 22 12272 12280
37. C. Corredor M. Borysiak J. Wolfer P. Westerhoff J. Posner Colorimetric Detection of Catalytic Reactivity of Nanoparticles in Complex Matrices Environ. Sci. Technol. 2015 49 6 3611 3618
38. A. P. Gondikas F. von der Kammer R. B. Reed S. Wagner J. F. Ranville T. Hofmann Release of TiO2 Nanoparticles from Sunscreens into Surface Waters: A One-Year Survey at the Old Danube Recreational Lake Environ. Sci. Technol. 2014 48 10 5415 5422
39. H. Gu M. D. Soucek Preparation and characterization of monodisperse cerium oxide nanoparticles in hydrocarbon solvents Chem. Mater. 2007 19 5 1103 1110
40. K. M. Parida A. C. Pradhan J. Das N. Sahu Synthesis and characterization of nano-sized porous gamma-alumina by control precipitation method Mater. Chem. Phys. 2009 113 1 244 248
41. P.-Y. Hsu, J.-J. Lin, B.-W. Lai, Y.-L. Wu, C.-F. Yang and S.-S. Lin, FTIR Characterizations of the Gamma-Ray-Irradiated Silica Nanoparticles/γ-APTES Nanocomposite with UV Annealing, in Intelligent Technologies and Engineering Systems, ed., J. Juang, and, Y.-C. Huang, Springer New York, 2013, vol. 234, pp. 893-899
42. R. Mackay H. Zhang Q. Wu Y. Z. Li NMR investigation of concentrated alumina and silica slurries Colloids Surf., A 2004 250 1-3 343 348
43. W. H. Kuan C. Y. Hu Chemical evidences for the optimal coagulant dosage and pH adjustment of silica removal from chemical mechanical polishing (CMP) wastewater Colloids Surf., A 2009 342 1-3 1 7
44. E. Matijevic S. V. Babu Colloid aspects of chemical-mechanical planarization J. Colloid Interface Sci. 2008 320 1 219 237
45. M. D. Montano H. R. Badiei S. Bazargan J. F. Ranville Improvements in the detection and characterization of engineered nanoparticles using spICP-MS with microsecond dwell times Environ. Sci.: Nano 2014 1 4 338 346
46. X. Y. Bi S. Lee J. F. Ranville P. Sattigeri A. Spanias P. Herckes P. Westerhoff Quantitative resolution of nanoparticle sizes using single particle inductively coupled plasma mass spectrometry with the K-means clustering algorithm J. Anal. At. Spectrom. 2014 29 9 1630 1639
47. W. Stumm, Chemistry of the Solid-Water Interface, New York, Wiley, 1992, pp. 269-286
48. L. A. Defaria S. Trasatti THE POINT OF ZERO CHARGE OF CEO2 J. Colloid Interface Sci. 1994 167 2 352 357
49. M. Kosmulski The pH-dependent surface charging and the points of zero charge J. Colloid Interface Sci. 2002 253 1 77 87
50. U. P. Azad V. Ganesan M. Pal Catalytic reduction of organic dyes at gold nanoparticles impregnated silica materials: influence of functional groups and surfactants J. Nanopart. Res. 2011 13 9 3951 3959
51. B. Johnson, Microtox acute toxicity test, in Freshwater Toxicity Investigations, Part 2, ed., C. Blaise, and, J. F. Ferard, Springer: Dordrecht, The Netherlands, 2005, pp. 69-105
52. R. Doshi W. Braida C. Christodoulatos M. Wazne G. O'Connor Nano-aluminum: Transport through sand columns and environmental effects on plants and soil communities Environ. Res. 2008 106 3 296 303
53. I. Velzeboer A. J. Hendriks A. M. J. Ragas D. Van de Meent Aquatic ecotoxicity tests of some nanomaterials Environ. Toxicol. Chem. 2008 27 9 1942 1947
54. F. Schrurs D. Lison Focusing the research effort Nat. Nanotechnol. 2012 7 9 546 548
55. T. Yu A. Malugin H. Ghandehari Impact of Silica Nanoparticle Design on Cellular Toxicity and Hemolytic Activity ACS Nano 2011 5 7 5717 5728
56. H. Zhang D. R. Dunphy X. Jiang H. Meng B. Sun D. Tarn M. Xue X. Wang S. Lin Z. Ji R. Li F. L. Garcia J. Yang M. L. Kirk T. Xia J. I. Zink A. Nel C. J. Brinker Processing Pathway Dependence of Amorphous Silica Nanoparticle Toxicity: Colloidal vs Pyrolytic J. Am. Chem. Soc. 2012 134 38 15790 15804
57. A. M. Schrand M. F. Rahman S. M. Hussain J. J. Schlager D. A. Smith S. F. Ali Metal-based nanoparticles and their toxicity assessment Wiley Interdiscip. Rev.: Nanomed. Nanobiotechnol. 2010 2 5 544 568
58. W. Lin Y.-W. Huang X.-D. Zhou Y. Ma in vitro toxicity of silica nanoparticles in human lung cancer cells Toxicol. Appl. Pharmacol. 2006 217 3 252 259
59. L. Otero-Gonzalez R. Sierra-Alvarez S. Boitano J. A. Field Application and Validation of an Impedance-Based Real Time Cell Analyzer to Measure the Toxicity of Nanoparticles Impacting Human Bronchial Epithelial Cells Environ. Sci. Technol. 2012 46 18 10271 10278
60. A. Karakoti S. Singh J. M. Dowding S. Seal W. T. Self Redox-active radical scavenging nanomaterials Chem. Soc. Rev. 2010 39 11 4422 4432
61. A. S. Karakoti P. Munusamy K. Hostetler V. Kodali S. Kuchibhatla G. Orr J. G. Pounds J. G. Teeguarden B. D. Thrall D. R. Baer Preparation and characterization challenges to understanding environmental and biological impacts of ceria nanoparticles Surf. Interface Anal. 2012 44 8 882 889
62. L. Chen R. A. Yokel B. Hennig M. Toborek Manufactured Aluminum Oxide Nanoparticles Decrease Expression of Tight Junction Proteins in Brain Vasculature J. Neuroimmune Pharmacol. 2008 3 4 286 295
63. A. L. Di Virgilio M. Reigosa Fernandez Lorenzo de Mele, M., Response of UMR 106 cells exposed to titanium oxide and aluminum oxide nanoparticles J. Biomed. Mater. Res., Part A 2010 92A 1 80 86
64. A. L. Di Virgilio M. Reigosa P. M. Arnal Fernandez Lorenzo de Mele, M., Comparative study of the cytotoxic and genotoxic effects of titanium oxide and aluminium oxide nanoparticles in Chinese hamster ovary (CHO-K1) cells J. Hazard. Mater. 2010 177 1-3 711 718
65. S. Pakrashi S. Dalai T. C. Prathna S. Trivedi R. Myneni A. M. Raichur N. Chandrasekaran A. Mukherjee Cytotoxicity of aluminium oxide nanoparticles towards fresh water algal isolate at low exposure concentrations Aquat. Toxicol. 2013 132 34 45
66. Z. Poborilova R. Opatrilova P. Babula Toxicity of aluminium oxide nanoparticles demonstrated using a BY-2 plant cell suspension culture model Environ. Exp. Bot. 2013 91 1 11
67. E. Radziun J. D. Wilczynska I. Ksiazek K. Nowak E. L. Anuszewska A. Kunicki A. Olszyna T. Zabkowski Assessment of the cytotoxicity of aluminium oxide nanoparticles on selected mammalian cells Toxicol. in vitro 2011 25 8 1694 1700
68. A. J. Wagner C. A. Bleckmann R. C. Murdock A. M. Schrand J. J. Schlager S. M. Hussain Cellular interaction of different forms of aluminum nanoparticles in rat alveolar macrophages J. Phys. Chem. B 2007 111 25 7353 7359
69. P. Westerhoff S. Lee Y. Yang G. Gordon K. Hristovski R. U. Halden P. Herckes Examination of opportunities for metal prospecting in municipal biosolids by analysis of samples from full scale wastewater treatment plants Environ. Sci. Technol. 2015 10.1021/es505329q
70. X. Zheng Y. Su Y. Chen Acute and Chronic Responses of Activated Sludge Viability and Performance to Silica Nanoparticles Environ. Sci. Technol. 2012 46 13 7182 7188
71. M. Sibag B. G. Choi C. Suh K. H. Lee J. W. Lee S. K. Maeng J. Cho Inhibition of total oxygen uptake by silica nanoparticles in activated sludge J. Hazard. Mater. 2015 283 841 846
72. R. B. Reed D. G. Goodwin K. L. Marsh S. S. Capracotta C. P. Higgins D. H. Fairbrother J. F. Ranville Detection of single walled carbon nanotubes by monitoring embedded metals Environ. Sci.: Processes Impacts 2013 15 1 204 213
73. P. A. Holden F. Klaessig R. F. Turco J. H. Priester C. M. Rico H. Avila-Arias M. Mortimer K. Pacpaco J. L. Gardea-Torresdey Evaluation of Exposure Concentrations Used in Assessing Manufactured Nanomaterial Environmental Hazards: Are They Relevant? Environ. Sci. Technol. 2014 48 18 10541 10551
74. Commission, E., Eur. Commission., Commission Staff Working Paper. Types and uses of nanomaterials, including safety aspects, Accompanying the Communication from the Commission to the European Parliament, the Council and the European Economic and Social Committee on the Second Regulatory Review on Nanomaterials; SWD(2012) 288 final; European Commission: Brussels, 3.10.2012, 2012, p. 111, http://ec.europa.eu/nanotechnology/pdf/second-regulatory-review-on-nanomaterials--staff-working-paper-accompanying-com (2012)-572.pdf, (Aug. 15, 2014), 2012
75. F. Piccinno F. Gottschalk S. Seeger B. Nowack Industrial production quantities and uses of ten engineered nanomaterials in Europe and the world J. Nanopart. Res. 2012 14 1109
76. 2 and nanoporous silica to selected invertebrate species and bacteria: FP7 project NanoValid Toxicol. Lett. 2013 221 S100 S100
77. M. P. Casado A. Macken H. J. Byrne Ecotoxicological assessment of silica and polystyrene nanoparticles assessed by a multitrophic test battery Environ. Int. 2013 51 97 105
78. L. Clement A. Zenerino C. Hurel S. Amigoni E. T. de Givenchy F. Guittard N. Marmier Toxicity assessment of silica nanoparticles, functionalised silica nanoparticles, and HASE-grafted silica nanoparticles Sci. Total Environ. 2013 450 120 128
79. L. De Marzi A. Monaco J. De Lapuente D. Ramos M. Borras M. Di Gioacchino S. Santucci A. Poma Cytotoxicity and genotoxicity of ceria nanoparticles on different cell lines in vitro Int. J. Mol. Sci. 2013 14 2 3065 3077
80. J. Ji Z. Long D. Lin Toxicity of oxide nanoparticles to the green algae Chlorella sp Chem. Eng. J. 2011 170 2-3 525 530
81. S. Lanone F. Rogerieux J. Geys A. Dupont E. Maillot-Marechal J. Boczkowski G. Lacroix P. Hoet Comparative toxicity of 24 manufactured nanoparticles in human alveolar epithelial and macrophage cell lines Part. Fibre Toxicol. 2009 6 14 1 12
82. W. Lin Y.-W. Huang X.-D. Zhou Y. Ma Toxicity of cerium oxide nanoparticles in human lung cancer cells Int. J. Toxicol. 2006 25 6 451 457
83. E.-J. Park J. Choi Y.-K. Park K. Park Oxidative stress induced by cerium oxide nanoparticles in cultured BEAS-2B cells Toxicology 2008 245 1-2 90 100
84. J. Sun S. Wang D. Zhao F. H. Hun L. Weng H. Liu Cytotoxicity, permeability, and inflammation of metal oxide nanoparticles in human cardiac microvascular endothelial cells. Cytotoxicity, permeability, and inflammation of metal oxide nanoparticles Cell Biol. Toxicol. 2011 27 5 333 342
85. S. Yang R. Ye B. Han C. Wei X. Yang Ecotoxicological effect of nano-silicon dioxide particles on Daphnia magna Integr. Ferroelectr. 2014 154 1 64 72