Effect of WO3 precursor and sulfurization process on WS2 crystals growth by atmospheric pressure CVD

Materials Letters

Volumn 156, Issue , 2015, Pages 156-160

  Thangaraja, Amutha ^a   Shinde, Sachin M ^a   Kalita, Golap ^a   Tanemura, Masaki ^a  

^a NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Chemical vapor deposition; Pyramid like structure; Sulfurization; Triangular crystals; WS2 crystals

Indexed keywords

ATMOSPHERIC CHEMISTRY; ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; CRYSTAL STRUCTURE; PRESSURE EFFECTS; PROCESS CONTROL; SILICA;

ATMOSPHERIC PRESSURE CVD; CHEMICAL VAPOR DEPOSITIONS (CVD); CONTROLLABLE SYNTHESIS; HIGH QUALITY; LAYER NUMBER; LAYERED MATERIAL; STACKED STRUCTURE; SULFURIZATION;

TUNGSTEN COMPOUNDS;

EID: 84930195723     PISSN: 0167577X     EISSN: 18734979     Source Type: Journal    
DOI: 10.1016/j.matlet.2015.05.020     Document Type: Article

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