Direct synthesis of multi-layer graphene film on various substrates by microwave plasma at low temperature

Thin Solid Films

Volumn 587, Issue , 2015, Pages 8-13

  Park, Hyun Jae ^b   Ahn, Byung Wook ^a   Kim, Tae Yoo ^a   Lee, Jung Woo ^a   Jung, Yong Ho ^b   Choi, Yong Sup ^b   Song, Young Il ^a   Suh, Su Jeong ^a  

^a Sungkyunkwan University   (South Korea)

^b Plasma Technology Research Center   (South Korea)

Author keywords

Direct graphene synthesis; Electron cyclone resonance microwave plasma; Low temperature; Various substrates; Vertically standing multi layer graphene

Indexed keywords

ELECTRONS; FIELD EMISSION; GLASS; GRAPHENE; INFRARED DEVICES; LOW TEMPERATURE PRODUCTION; MICROWAVES; NEAR INFRARED SPECTROSCOPY; OPTICAL PROPERTIES; OXIDE FILMS; PROBES; SHEET RESISTANCE; SILICA; SILICON OXIDES; SILICON WAFERS; STORMS; SURFACE RESISTANCE; TEMPERATURE;

CYLINDRICAL LANGMUIR PROBE; DIFFERENT SUBSTRATES; ELECTRICAL RESISTANCES; EXPERIMENTAL CONDITIONS; LOW TEMPERATURES; MICROWAVE PLASMA; SURFACE RESISTANCE MEASUREMENTS; VARIOUS SUBSTRATES;

SUBSTRATES;

EID: 84929264015     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2015.01.011     Document Type: Article

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