Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements

Optics Express

Volumn 23, Issue 3, 2015, Pages 2451-2465

  Hsieh, Hung Lin ^a   Pan, Ssu Wen ^a  

^a NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; DEGREES OF FREEDOM (MECHANICS); INTERFEROMETERS; INTERFEROMETRY; LIGHT SOURCES;

ANGLE INFORMATION; DISPLACEMENT INFORMATION; INTERNAL CAPACITANCE; MEASUREMENT EXPERIMENTS; MEASUREMENT RESOLUTION; MICHELSON INTERFEROMETRY; PIEZO STAGE; SIX DEGREE-OF-FREEDOM;

DISPLACEMENT MEASUREMENT;

EID: 84922813709     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.23.002451     Document Type: Article

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