Heterodyne interferometric system with subnanometer accuracy for measurement of straightness

Applied Optics

Volumn 43, Issue 19, 2004, Pages 3812-3816

  Wu, Chien Ming ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ERROR ANALYSIS; INTERFEROMETERS; LITHOGRAPHY; MIRRORS; POLARIZATION; SPURIOUS SIGNAL NOISE;

HEWLETT-PACKARD (CO); OPTICAL PATH DIFFERENCE (OPD); POLARIZATION MIXING;

HETERODYNING;

EID: 3142541500     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.003812     Document Type: Article

References (11)

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