Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures

Microelectronic Engineering

Volumn 141, Issue , 2015, Pages 72-80

  Zhang, Xiao Sheng ^a   Su, Zong Ming ^a   Han, Meng Di ^a   Meng, Bo ^a   Zhu, Fu Yun ^a   Zhang, Hai Xia ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

Micro electro mechanical systems (MEMS); Micro nano hierarchical structures; Parylene C; Pattern transfer; Soft lithography

Indexed keywords

BIOCOMPATIBILITY; FABRICATION; HYDROPHOBICITY; LITHOGRAPHY; MEMS; MICROSTRUCTURE; MOLDS; NANOSTRUCTURES; RAMAN SCATTERING; REACTIVE ION ETCHING; SILICON; SURFACE SCATTERING;

HIERARCHICAL STRUCTURES; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PARYLENE C; PATTERN TRANSFERS; SOFT LITHOGRAPHY;

HIERARCHICAL SYSTEMS;

EID: 84922783545     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2015.01.038     Document Type: Article

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