Wide-bandwidth piezoelectric energy harvester integrated with parylene-C beam structures

Microelectronic Engineering

Volumn 111, Issue , 2013, Pages 214-219

  Huang, Po Cheng ^a   Tsai, Tung Hsiang ^a   Yang, Yao Joe ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Ambient vibration; Doubly clamped beam; Energy harvester; MEMS; Piezoelectric

Indexed keywords

BANDWIDTH; ENERGY HARVESTING; FREQUENCY RESPONSE; MEMS; OPEN CIRCUIT VOLTAGE;

AMBIENT VIBRATIONS; BROAD FREQUENCY RANGE; DOUBLY CLAMPED BEAM; ENERGY HARVESTER; ISOTROPIC WET ETCHING; OSCILLATION AMPLITUDE; PIEZOELECTRIC; PIEZOELECTRIC ENERGY HARVESTERS;

PIEZOELECTRICITY;

EID: 84885177725     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2013.03.158     Document Type: Article

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