Highly flexible, transparent and patternable parylene-c superhydrophobic films with high and low adhesion

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 1143-1146

  Lu, Bo ^a   Lin, Jeffrey Chun Hui ^a   Liu, Zhao ^a   Lee, Yi Kuen ^b   Tai, Yu Chong ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^b HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMIMETIC DESIGN; DROPLET-BASED MICROFLUIDICS; HIGH-ADHESION; LOTUS LEAF; LOW ADHESION; MICRO/NANOSTRUCTURES; PARYLENE C; PARYLENES; PLASMA TREATMENT; SELECTIVE PATTERNING; SUPERHYDROPHOBIC; SUPERHYDROPHOBIC FILMS;

ADHESION; BIOMIMETICS; CONTACT ANGLE; MECHANICAL ENGINEERING; MECHANICS; MEMS; REACTIVE ION ETCHING;

HYDROPHOBICITY;

EID: 79953797162     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734632     Document Type: Conference Paper

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