Inductance of circuit structures for MIT LL superconductor electronics fabrication process with 8 niobium layers

IEEE Transactions on Applied Superconductivity

Volumn 25, Issue 3, 2015, Pages

  Tolpygo, Sergey K ^a   Bolkhovsky, Vladimir ^a   Weir, T J ^a   Galbraith, C J ^a   Johnson, Leonard M ^a   Gouker, Mark A ^a   Semenov, Vasili K ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b STONY BROOK UNIVERSITY   (United States)

Author keywords

ERSFQ; inductance; inductance extractor; Nb Al AlOx Nb Josephson junctions; RQL; RSFQ circuits; SQUID; superconducting microstrip; superconducting stripline; superconductor electronics; superconductor electronics fabrication

Indexed keywords

ELECTRIC INDUCTORS; FABRICATION; JOSEPHSON JUNCTION DEVICES; LINEWIDTH; NIOBIUM; SQUIDS; STRIP TELECOMMUNICATION LINES; SUPERCONDUCTING FILMS; SUPERCONDUCTING MATERIALS; TIMING CIRCUITS;

ERSFQ; JOSEPHSON; RSFQ CIRCUITS; SUPERCONDUCTING MICROSTRIPS; SUPERCONDUCTING STRIPLINE; SUPERCONDUCTOR ELECTRONICS;

INDUCTANCE;

EID: 84919800495     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2014.2369213     Document Type: Article

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