Gas sensing properties of very thin TiO2 films prepared by atomic layer deposition (ALD)

Journal of Physics: Conference Series

Volumn 559, Issue 1, 2014, Pages

  Boyadjiev, S ^a   Georgieva, V ^b   Vergov, L ^b   Baji, Zs ^c   Gaber F ^a   Szilagyi I M ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

^c INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL DETECTION; CONDENSED MATTER PHYSICS; COST EFFECTIVENESS; DEPOSITION; GAS DETECTORS; GAS SENSING ELECTRODES; METALS; OXIDE FILMS; QUARTZ CRYSTAL MICROBALANCES; THIN FILMS; TITANIUM DIOXIDE; TRANSITION METAL COMPOUNDS; TRANSITION METALS;

COST-EFFECTIVE TECHNOLOGY; GAS SENSING PROPERTIES; LOW CONCENTRATIONS; PROTOTYPE STRUCTURES;

ATOMIC LAYER DEPOSITION;

EID: 84913580446     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/559/1/012013     Document Type: Conference Paper

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