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Applied Surface Science

Volumn 100-101, Issue , 1996, Pages 391-398

Surface chemistry of materials deposition at atomic layer level

(1) Suntola, Tuomo a

a Microchemistry Ltd (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CRYSTAL ATOMIC STRUCTURE; EPITAXIAL GROWTH; MOLECULAR STRUCTURE; PROCESS CONTROL; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; SEMICONDUCTOR SUPERLATTICES; SURFACES;

ATOMIC LAYER EPITAXY; ATOMIC LAYER LEVEL; CONTROLLED GROWTH; SURFACE CHEMISTRY; THIN FILM ELECTROLUMINESCENT DISPLAYS;

DEPOSITION;

EID: 0030564312 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/0169-4332(96)00306-6 Document Type: Article

Times cited : (111)

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