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Volumn 9, Issue 2, 2014, Pages 467-474

Characterization of RF and DC magnetron reactive sputtered TiO2 thin films for gas sensors

Author keywords

Gas sensor; Quartz crystal microbalance; Reactive sputtering; Thin films

Indexed keywords


EID: 84898425176     PISSN: None     EISSN: 18423582     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (9)

References (32)
  • 20
    • 84898445701 scopus 로고
    • Handbook of X-Ray Photoelectron Spectroscopy, Perkin-Elmer Corp., Eden Prairie, MN
    • C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder, G. E. Mullenberg (Ed.), Handbook of X-Ray Photoelectron Spectroscopy, Perkin-Elmer Corp., Eden Prairie, MN (1979).
    • (1979)
    • Wagner, C.D.1    Riggs, W.M.2    Davis, L.E.3    Moulder, J.F.4    Mullenberg, G.E.5
  • 27
    • 0002639556 scopus 로고
    • Sputtering by particle bombardment II
    • in: R. Behrisch (Ed.), Springer-Verlag, Berlin
    • G. Betz, G. K. Wehner, Sputtering by particle bombardment II, in: R. Behrisch (Ed.), Topics in Applied Physics Vol. 52, Springer-Verlag, Berlin (1983), p. 11.
    • (1983) Topics In Applied Physics , vol.52 , pp. 11
    • Betz, G.1    Wehner, G.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.