NOx sensing properties of In2O3 thin films grown by MOCVD

Sensors and Actuators, B: Chemical

Volumn 129, Issue 1, 2008, Pages 467-472

  Ali, M ^a   Wang, Ch Y ^a   Rohlig C C ^a   Cimalla, V ^a   Stauden, Th ^a   Ambacher, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Gas sensor; Indium oxide; MOCVD; NOx detection; Recovery time; Response time

Indexed keywords

CHEMICAL SENSORS; INDIUM COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITROGEN COMPOUNDS;

INDIUM OXIDE; SENSING PROPERTIES;

THIN FILMS;

EID: 38149054099     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.08.011     Document Type: Review

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