A CMOS micromachined capacitive tactile sensor with integrated readout circuits and compensation of process variations

IEEE Transactions on Biomedical Circuits and Systems

Volumn 8, Issue 5, 2014, Pages 608-616

  Tsai, Tsung Heng ^a   Tsai, Hao Cheng ^a   Wu, Tien Keng ^a,b  

^a NATIONAL CHUNG CHENG UNIVERSITY   (Taiwan)

^b Richtek ^*  (Taiwan)

Author keywords

CMOS integrated circuits; micromachining; tactile sensors

Indexed keywords

CAPACITIVE SENSORS; CAPACITORS; DEPOSITION; MICROMACHINING; READOUT SYSTEMS;

CORRELATED DOUBLE SAMPLING; FULLY DIFFERENTIAL; INTEGRATED READOUT; PROCESS VARIATION; SHAPED STRUCTURES; STANDARD CMOS PROCESS; TACTILE SENSORS; THIN-FILM DEPOSITIONS;

CMOS INTEGRATED CIRCUITS;

DEVICES; ELECTRONICS; EQUIPMENT DESIGN; MICROTECHNOLOGY; SEMICONDUCTOR;

ELECTRONICS; EQUIPMENT DESIGN; MICROTECHNOLOGY; SEMICONDUCTORS;

EID: 84910139505     PISSN: 19324545     EISSN: None     Source Type: Journal    
DOI: 10.1109/TBCAS.2014.2358563     Document Type: Article

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