Low cost thin film based piezoresistive MEMS tactile sensor

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 17-22

  Wisitsoraat, A ^a   Patthanasetakul, V ^a   Lomas, T ^a   Tuantranont, A ^a  

^a NATIONAL ELECTRONICS AND COMPUTER TECHNOLOGY CENTER   (Thailand)

Author keywords

MEMS; Physical sensor; Tactile sensor; Thin film sensor

Indexed keywords

FILM THICKNESS; MEMS; MICROMACHINING; OPTICAL SENSORS; PHOTORESISTS; SEMICONDUCTING INDIUM COMPOUNDS; SILICON;

PHYSICAL SENSORS; TACTILE SENSORS; THIN FILM SENSORS;

THIN FILMS;

EID: 34548168664     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.10.037     Document Type: Article

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