CMOS-Based Tactile Microsensor for Medical Instrumentation

IEEE Sensors Journal

Volumn 7, Issue 2, 2007, Pages 258-265

  Vančura, Tobias ^a,c   Baltes, Henry ^a  

^a ETH ZURICH   (Switzerland)

^b VAISALA OYJ   (Finland)

^c Nanonis AG   (Switzerland)

Author keywords

Membrane capacitor; monolithically integrated; tactile sensing; tonometry

Indexed keywords

EID: 85008055238     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2006.886902     Document Type: Article

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