Engineering Properties of Superhard Films with Ion Energy and Post-Deposition Processing

AIP Conference Proceedings

Volumn 680, Issue , 2003, Pages 630-634

  Monteiro, Othon R ^a   Delplancke Ogletree, Marie Paule ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITÉ LIBRE DE BRUXELLES   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CARBIDES; CARBON; CARBON FILMS; DEPOSITION; INDUSTRIAL RESEARCH; INTERFACES (MATERIALS); ION IMPLANTATION; IONS; PLASMA APPLICATIONS; SUBSTRATES;

DIAMOND LIKE CARBON; ENGINEERING PROPERTIES; GRADED INTERFACES; INTRINSIC STRESS; METAL PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION; PHYSICAL AND CHEMICAL PROPERTIES; PLASMA SYNTHESIS; TEMPERATURE SENSITIVE SUBSTRATES;

ION BEAM ASSISTED DEPOSITION;

EID: 84908353632     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.1619795     Document Type: Conference Paper

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