Inelastic background analysis of HAXPES spectra: Towards enhanced bulk sensitivity in photoemission

Surface and Interface Analysis

Volumn 46, Issue 10-11, 2014, Pages 906-910

  Risterucci, Paul ^a   Renault, Olivier ^a   Martinez, Eugénie ^a   Detlefs, Blanka ^a,b   Zegenhagen, Jorg ^b   Grenet, Geneviève ^c   Tougaard, Sven ^d  

^a CEA GRENOBLE   (France)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c ECOLE CENTRALE DE LYON   (France)

^d UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

HAXPES; High k; Inelastic background; Metal gate; Tougaard method

Indexed keywords

ECONOMIC AND SOCIAL EFFECTS; EXCITATION ENERGY; PHOTOIONIZATION; X RAY PHOTOELECTRON SPECTROSCOPY; X RAYS;

HAX-PES; HIGH- K; INELASTIC BACKGROUND; METAL GATE; TOUGAARD METHOD;

INELASTIC SCATTERING;

EID: 84908219600     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.5484     Document Type: Article

References (15)

1. S. Tanuma, C. J. Powell, D. R. Penn, Surf. Interface Anal. 1994, 21(3), 165-176.
2. P. J. Cumpson, J. Electron Spectros. Related Phen. 1995, 73(1), 25-52.
3. G. Panaccione, K. Kobayashi, Surf. Sci. 2012, 606(3-4), 125-129.
4. S. Tanuma, C. J. Powell, D. R. Penn, Surf. Interface Anal. 2011, 43(3), 689-713.
5. M. B. Trzhaskovskaya, V. K. Nikulin, V. I. Nefedov, V. G. Yarzhemsky, Atom. Data Nuc. Data Tables 2006, 92(2), 245-304.
6. S. Tougaard, Appl. Surf. Sci. 1996, 100-101, 1-10.
7. P. Risterucci, O. Renault, E. Martinez, B. Detlefs, V. Delaye, J. Zegenhagen, C. Gaumer, G. Grenet, S. Tougaard, Appl. Phys. Lett. 2014, 104(5), 051608.
8. J. Zegenhagen, B. Detlefs, T.-L. Lee, S. Thiess, H. Isern, L. Petit, L. André, J. Roy, Y. Mi, I. Joumard, J. Electron Spectros. Related Phen. 2010, 178-179, 258-267.
9. S. Tougaard, QUASES-Analyze Software for Quantitative XPS/AES of Surface Nanostructures by Analysis of the Peak-shape and the Background, Ver. 5.1(1994-2008). 〈http://www.quases.com〉.
10. S. Tougaard, J. Vac. Scie. Technol. A: Vacuum, Surfaces, and Films 2013, 31(3), 031503.
11. S. Tougaard, J. Electron Spectros. Related Phen. 2010, 178-179, 128-153.
12. L. Kövér, J. Electron Spectros. Related Phen. 2013, 190, Part B, 144-152.
13. S. Tougaard, Surf. Interface Anal. 1997, 25(3), 137-154.
14. J. Rubio-Zuazo, P. Ferrer, G. R. Castro, J. Electron Spectrosc, Related Phenom. 2010, 180(1-3), 27-33.
15. C. D. Wagner, J. Vac. Sci. Technol. 1978, 15(2), 518-523.