|
Volumn 180, Issue 1-3, 2010, Pages 27-33
|
Non-destructive compositional depth profile in the tens-of-nanometer scale
|
Author keywords
Depth profile; Hard X Ray Photoelectron Spectroscopy; Synchrotron radiation
|
Indexed keywords
CHEMICAL DIFFUSION;
COMPOSITIONAL DEPTH PROFILE;
DEPTH PROFILE;
DETECTION OF CHEMICALS;
ELECTRON KINETIC ENERGY;
ENERGY EXCITATION;
HARD X RAY;
HARD X-RAY PHOTOELECTRON SPECTROSCOPY;
INTER-DIFFUSION;
NANO-METER SCALE;
NON DESTRUCTIVE;
STACKING LAYERS;
SYNCHROTRON X RAYS;
TUNABILITIES;
X-RAY REFLECTIVITY TECHNIQUES;
CHEMICAL DETECTION;
CHEMICAL ELEMENTS;
ELECTRON ENERGY LOSS SPECTROSCOPY;
ELECTRONS;
KINETIC ENERGY;
MONOLAYERS;
PHOTOELECTRICITY;
PHOTOIONIZATION;
PHOTONS;
PROFITABILITY;
SYNCHROTRON RADIATION;
SYNCHROTRONS;
X RAYS;
X RAY PHOTOELECTRON SPECTROSCOPY;
|
EID: 77954216351
PISSN: 03682048
EISSN: None
Source Type: Journal
DOI: 10.1016/j.elspec.2010.03.013 Document Type: Article |
Times cited : (16)
|
References (22)
|