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Volumn 180, Issue 1-3, 2010, Pages 27-33

Non-destructive compositional depth profile in the tens-of-nanometer scale

Author keywords

Depth profile; Hard X Ray Photoelectron Spectroscopy; Synchrotron radiation

Indexed keywords

CHEMICAL DIFFUSION; COMPOSITIONAL DEPTH PROFILE; DEPTH PROFILE; DETECTION OF CHEMICALS; ELECTRON KINETIC ENERGY; ENERGY EXCITATION; HARD X RAY; HARD X-RAY PHOTOELECTRON SPECTROSCOPY; INTER-DIFFUSION; NANO-METER SCALE; NON DESTRUCTIVE; STACKING LAYERS; SYNCHROTRON X RAYS; TUNABILITIES; X-RAY REFLECTIVITY TECHNIQUES;

EID: 77954216351     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2010.03.013     Document Type: Article
Times cited : (16)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.