Continuation-based pull-in and lift-off simulation algorithms for microelectromechanical devices

Journal of Microelectromechanical Systems

Volumn 23, Issue 5, 2014, Pages 1084-1093

  Zhang, Zheng ^a   Kamon, Mattan ^b   Daniel, Luca ^a  

^a Department of Electrical Engineering and Computer Science   (United States)

^b European Headquarter and Development Center   (United States)

Author keywords

continuation.; lift off; MEMS CAD; pull in

Indexed keywords

CONTINUATION; LIFT-OFF; MEMS CADS; PULL-IN; SIMULATION ALGORITHMS;

EID: 84907931825     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2014.2304967     Document Type: Article

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