New simulation and experimental methodology for analyzing pull-in and release in MEMS switches

2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

Volumn , Issue , 2013, Pages 2373-2376

  Kamon, M ^a   Maity, S ^a   Dereus, D ^b   Zhang, Z ^c   Cunningham, S ^b   Kim, S ^b   McKillop, J ^b   Morris, A ^b   Lorenz, G ^a   Daniel, L ^c  

^a Department of Mechanical Engineering   (United States)

^b WiSpry   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

behavioral; finite element; MEMS modeling; MEMS switch; pull in; release; simulation

Indexed keywords

BEHAVIORAL; MEMS MODELING; MEMS SWITCHES; PULL-IN; RELEASE; SIMULATION;

ACTUATORS; ELECTRIC SWITCHES; MICROSYSTEMS; SOLID-STATE SENSORS;

FINITE ELEMENT METHOD;

EID: 84891697874     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/Transducers.2013.6627283     Document Type: Conference Paper

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