Novel 3D modeling methods for virtual fabrication and EDA compatible design of MEMS via parametric libraries

Journal of Micromechanics and Microengineering

Volumn 20, Issue 6, 2010, Pages

  Schröpfer, Gerold ^a   Lorenz, Gunar ^a   Rouvillois, Stéphane ^a   Breit, Stephen ^a  

^a European Headquarter and Development Center   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3-D MODELING; 3D GEOMETRY; 3D MODELING TOOLS; 3D MODELS; BEHAVIORAL MODEL; CAD MODELING; COMPATIBLE DESIGN; DEPENDENT VARIABLES; DESIGN ERRORS; ELECTRONIC DESIGN AUTOMATION; FABRICATED DEVICE; FEATURE-BASED; INTEGRATED ELECTRONICS; MEMSDEVICES; MODELING TECHNIQUE; NEW MODEL; PARAMETERIZED; PARAMETRIC COMPONENTS; PROCESS DEVELOPMENT; PROCESS MODELING; STEP-BY-STEP; VIRTUAL FABRICATION; VIRTUAL PROTOTYPE;

COMPUTER AIDED DESIGN; DIGITAL LIBRARIES; EQUIPMENT; FABRICATION; FAILURE ANALYSIS; QUALITY ASSURANCE; VISUALIZATION;

THREE DIMENSIONAL;

EID: 78650924296     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/6/064003     Document Type: Article

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