Scale down of p-n junction diodes of an uncooled IR-FPA for improvement of the sensitivity and thermal time response by 0.13 μm CMOS technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8012, Issue , 2011, Pages

  Fujiwara, Ikuo ^a   Sasaki, Keita ^a   Suzuki, Kazuhiro ^a   Yagi, Hitoshi ^a   Kwon, Honam ^a   Honda, Hiroto ^a   Ishii, Koichi ^a   Ogata, Masako ^a   Atsuta, Masaki ^a   Ueno, Risako ^a   Kobayashi, Mitsuyoshi ^a   Funaki, Hideyuki ^a  

^a TOSHIBA CORPORATION   (Japan)

Author keywords

CMOS; Diode; Focal plane array; Infrared; Scaling; SOI; Trade off; Uncooled

Indexed keywords

CMOS; FOCAL PLANE; SCALING; SOI; TRADE-OFF; UNCOOLED;

CELLS; CMOS INTEGRATED CIRCUITS; DIODES; FOCUSING; INFRARED RADIATION; SEMICONDUCTOR JUNCTIONS; TECHNOLOGY;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 80053003842     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.883342     Document Type: Conference Paper

References (5)

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3. H. Honda, H. Funaki, I. Fujiwara, H. Yagi, K. Ishii, K. Suzuki, K. Sasaki, M. Ogata, R, Ueno, and H. Kwon, "A 320 × 240 pixel uncooled TEC-less infrared radiation focal plane array with the reset noise canceling algorithm, " Proc. SPIE 7660, 76600Z(2010).
4. M. Kimata, M. Ueno, M. Takeda, T. Seto, "SOI diode uncooled infrared focal plane arrays, " Proc. SPIE 6127, 61270X-1 (2006).
5. T. Ishikawa, M. Ueno, Y. Nakaki, K. Endo, Y. Ohta, J. Nakanishi, Y. Kosasayama, H. Yagi, T. Sone, and M. Kimata, "Performance of 320 × 240 Uncooled IRFPA with SOI Diode Detectors, " Proc. SPIE 4130, 152-159 (2000).