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Volumn 2, Issue , 1999, Pages 382-389

MEMS technologies for enabling high frequency communications circuits

Author keywords

MEMS; micromechanical; millimeter wave; RFIC; waveguide

Indexed keywords

CABLES; DIGITAL INTEGRATED CIRCUITS; ELECTROMECHANICAL DEVICES; MEMS; MILLIMETER WAVES; WAVEGUIDES;

EID: 84905462356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TELSKS.1999.806236     Document Type: Conference Paper
Times cited : (15)

References (23)
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  • 2
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  • 3
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    • Brown, E.R.1
  • 5
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    • High-performance three-dimensional on-chip inductors fabricated by novel micromachining technology for RF MMIC
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    • J.-B. Yoon, C.-H. Han, E. Yoon, and C.-K Kim, "High-Performance Three-Dimensional On-Chip Inductors Fabricated by Novel Micromachining Technology for RF MMIC", IEEE MTT-S Int. Microwave Sym. Dig., pp. 1523-1526, June 1999
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  • 12
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    • A micromachined variable capacitor for monolithic low-noise VCOs
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    • Micromechanical tuning elements in a 620 GHz integrated circuit
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    • V. M. Lubecke, W. R. McGrath. P. A. Stimson, and D. B. Rutledge. "Micromechanical tuning elements in a 620 GHz integrated circuit." IEEE Trans. Microwave Theory Tech., vol. MTT-46, No. 12 pp. 2098-2103, December 1998.
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.