Design, test and simulation of self-assembled, micromachined RF inductors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 582-591

  Gammel, P L ^a   Barber, B P ^a   Lubecke, V ^a   Belk, N ^a   Frei, M R ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC INDUCTORS; IMPEDANCE MATCHING (ELECTRIC); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; PRECISION ENGINEERING; SUBSTRATES; VARIABLE FREQUENCY OSCILLATORS;

CAPACITIVE COUPLING; MICROMACHINED INDUCTORS; SELF-RESONANT FREQUENCY;

INTEGRATED OPTOELECTRONICS;

EID: 0032652471     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341249     Document Type: Conference Paper

References (14)