Micromachining for terahertz applications

IEEE Transactions on Microwave Theory and Techniques

Volumn 46, Issue 11 PART 2, 1998, Pages 1821-1831

  Lubecke, Victor M ^a   Mizuno, Koji ^b   Rebeiz, Gabriel M ^c  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

MEMS; Micromachining; Millimeter wave; Submillimeter wave; Terahertz

Indexed keywords

ANTENNAS; MICROMACHINING; MILLIMETER WAVES; TUNERS; WAVEGUIDES;

FOCAL-PLANE IMAGING ARRAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032208619     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/22.734493     Document Type: Article

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