MEMS Millimeterwave components

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 1999, Pages 463-466

  Chiao, Jung Chih ^a   Fu, Yiton ^a   Choudhury, Debabani ^a   Lin, Lih Yuan ^a  

^a UNIVERSITY OF HAWAII   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; FLIP CHIP DEVICES; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MICROMACHINING; MICROWAVE ANTENNAS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; SWITCHES; TRANSCEIVERS;

MILLIMETER WAVE COMPONENTS; MILLIMETER WAVE TRANSCEIVERS; PLANAR IMPEDANCE TUNERS; RECONFIGURABLE ANTENNAS; SYSTEM INTEGRATION; THREE POLYSILICON LAYER PROCESS; VARIABLE CAPACITORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033360148     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)