Novel high-Q inductor based on Si 3D MMIC technology and its application

IEEE MTT-S International Microwave Symposium Digest

Volumn 2, Issue , 1999, Pages 489-492

  Kamogawa, Kenji ^a   Nishikawa, Kenjiro ^a   Tokumitsu, Tsuneo ^a   Tanaka, Masayoshi ^a  

^a NTT Network Innovation Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; ELECTRIC INDUCTORS; INTEGRATED CIRCUIT MANUFACTURE; MICROWAVE AMPLIFIERS; MICROWAVE ANTENNAS; PERSONAL COMMUNICATION SYSTEMS; POLYIMIDES; SILICON WAFERS; THICK FILMS; VARIABLE FREQUENCY OSCILLATORS;

FOLDED METAL INTERCONNECTION TECHNOLOGY; GROUND PLANE; LOW NOISE AMPLIFIER; PLANAR ANTENNA; Q FACTOR; SPIRAL INDUCTOR;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0033363812     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)